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Title: Substrate and coating defect planarization strategies for high-laser-fluence multilayer mirrors

Authors:
; ; ; ; ; ; ; ; ;
Publication Date:
Grant/Contract Number:
W-7405-ENG-48
Type:
Publisher's Accepted Manuscript
Journal Name:
Thin Solid Films
Additional Journal Information:
Journal Volume: 592; Journal Issue: PB; Related Information: CHORUS Timestamp: 2017-05-28 03:54:25; Journal ID: ISSN 0040-6090
Publisher:
Elsevier
Sponsoring Org:
USDOE
Country of Publication:
Netherlands
Language:
English
OSTI Identifier:
1249633