Substrate and coating defect planarization strategies for high-laser-fluence multilayer mirrors

Journal Article · 30 September 2015 · Thin Solid Films

DOI: https://doi.org/10.1016/j.tsf.2015.04.047 · OSTI ID:1249633

Stolz, Christopher J.; Wolfe, Justin E.; Mirkarimi, Paul B.; Folta, James A.; Adams, John J.; Menor, Marlon G.; Teslich, Nick E.; Soufli, Regina; Menoni, Carmen S.; Patel, Dinesh

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• Sponsoring Organization: USDOE
• Grant/Contract Number: W-7405-ENG-48
• OSTI ID: 1249633
• Journal Information: Thin Solid Films, Journal Name: Thin Solid Films Journal Issue: PB Vol. 592; ISSN 0040-6090
• Publisher: ElsevierCopyright Statement
• Country of Publication: Netherlands
• Language: English