Atomic Layer Deposition of MnS: Phase Control and Electrochemical Applications
Abstract
Manganese sulfide (MnS) thin films were synthesized via atomic layer deposition (ALD) using gaseous manganese bis(ethylcyclopentadienyl) and hydrogen sulfide as precursors. At deposition temperatures ≤150 °C phase-pure r-MnS thin films were deposited, while at temperatures >150 °C, a mixed phase, consisting of both r- and a-MnS resulted. In situ quartz crystal microbalance (QCM) studies validate the self-limiting behavior of both ALD half-reactions and, combined with quadrupole mass spectrometry (QMS) allow the derivation of a self-consistent reaction mechanism. Lastly, MnS thin films were deposited on copper foil and tested as a Li-ion battery anode. The MnS coin cells showed exceptional cycle stability and near-theoretical capacity.
- Authors:
-
- Univ. of Wisconsin, Stevens Point, WI (United States). Dept. of Chemistry
- Argonne National Lab. (ANL), Argonne, IL (United States). Energy Systems Division
- Argonne National Lab. (ANL), Argonne, IL (United States). Materials Science Division
- Publication Date:
- Research Org.:
- Argonne National Lab. (ANL), Argonne, IL (United States); Energy Frontier Research Centers (EFRC) (United States). Argonne-Northwestern Solar Energy Research Center (ANSER); Energy Frontier Research Centers (EFRC) (United States). Center for Electrical Energy Storage (CEES)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES); USDOE Office of Science (SC), Workforce Development for Teachers and Scientists (WDTS)
- OSTI Identifier:
- 1248178
- Grant/Contract Number:
- AC02-06CH11357; SC0001059
- Resource Type:
- Accepted Manuscript
- Journal Name:
- ACS Applied Materials and Interfaces
- Additional Journal Information:
- Journal Volume: 8; Journal Issue: 4; Journal ID: ISSN 1944-8244
- Publisher:
- American Chemical Society (ACS)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Riha, Shannon C., Koegel, Alexandra A., Meng, Xiangbo, Kim, In Soo, Cao, Yanqiang, Pellin, Michael J., Elam, Jeffrey W., and Martinson, Alex B. F. Atomic Layer Deposition of MnS: Phase Control and Electrochemical Applications. United States: N. p., 2016.
Web. doi:10.1021/acsami.5b11075.
Riha, Shannon C., Koegel, Alexandra A., Meng, Xiangbo, Kim, In Soo, Cao, Yanqiang, Pellin, Michael J., Elam, Jeffrey W., & Martinson, Alex B. F. Atomic Layer Deposition of MnS: Phase Control and Electrochemical Applications. United States. https://doi.org/10.1021/acsami.5b11075
Riha, Shannon C., Koegel, Alexandra A., Meng, Xiangbo, Kim, In Soo, Cao, Yanqiang, Pellin, Michael J., Elam, Jeffrey W., and Martinson, Alex B. F. Tue .
"Atomic Layer Deposition of MnS: Phase Control and Electrochemical Applications". United States. https://doi.org/10.1021/acsami.5b11075. https://www.osti.gov/servlets/purl/1248178.
@article{osti_1248178,
title = {Atomic Layer Deposition of MnS: Phase Control and Electrochemical Applications},
author = {Riha, Shannon C. and Koegel, Alexandra A. and Meng, Xiangbo and Kim, In Soo and Cao, Yanqiang and Pellin, Michael J. and Elam, Jeffrey W. and Martinson, Alex B. F.},
abstractNote = {Manganese sulfide (MnS) thin films were synthesized via atomic layer deposition (ALD) using gaseous manganese bis(ethylcyclopentadienyl) and hydrogen sulfide as precursors. At deposition temperatures ≤150 °C phase-pure r-MnS thin films were deposited, while at temperatures >150 °C, a mixed phase, consisting of both r- and a-MnS resulted. In situ quartz crystal microbalance (QCM) studies validate the self-limiting behavior of both ALD half-reactions and, combined with quadrupole mass spectrometry (QMS) allow the derivation of a self-consistent reaction mechanism. Lastly, MnS thin films were deposited on copper foil and tested as a Li-ion battery anode. The MnS coin cells showed exceptional cycle stability and near-theoretical capacity.},
doi = {10.1021/acsami.5b11075},
journal = {ACS Applied Materials and Interfaces},
number = 4,
volume = 8,
place = {United States},
year = {Tue Jan 19 00:00:00 EST 2016},
month = {Tue Jan 19 00:00:00 EST 2016}
}
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