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Title: Designing optical metamaterial with hyperbolic dispersion based on Al:ZnO/ZnO nano-layered structure using Atomic Layer Deposition technique

In this study, nano-layered Al:ZnO/ZnO hyperbolic dispersion metamaterial with a large number of layers was fabricated using the atomic layer deposition (ALD) technique. Experimental dielectric functions for Al:ZnO/ZnO structures are obtained by an ellipsometry technique in the visible and near-infrared spectral ranges. The theoretical modeling of the Al:ZnO/ZnO dielectric permittivity is done using effective medium approximation. A method for analysis of spectroscopic ellipsometry data is demonstrated to extract the optical permittivity for this highly anisotropic nano-layered metamaterial. The results of the ellipsometry analysis show that Al:ZnO/ZnO structures with a 1:9 ALD cycle ratio exhibit hyperbolic dispersion transition change near 1.8 μm wavelength.
Authors:
 [1] ;  [2] ;  [1]
  1. San Diego State Univ., San Diego, CA (United States)
  2. Brookhaven National Lab. (BNL), Upton, NY (United States)
Publication Date:
Report Number(s):
BNL-112047-2016-JA
Journal ID: ISSN 0003-6935; APOPAI; R&D Project: 16064/16064; KC0403020
Grant/Contract Number:
SC00112704; CFN user proposal 33123
Type:
Accepted Manuscript
Journal Name:
Applied Optics
Additional Journal Information:
Journal Volume: 55; Journal Issue: 11; Journal ID: ISSN 0003-6935
Publisher:
Optical Society of America (OSA)
Research Org:
Brookhaven National Laboratory (BNL), Upton, NY (United States)
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY; materials; anisotropic optical materials; metamaterials; ellipsometry and polarimetry
OSTI Identifier:
1247974
Alternate Identifier(s):
OSTI ID: 1245507

Kelly, Priscilla, Liu, Mingzhao, and Kuznetsova, Lyuba. Designing optical metamaterial with hyperbolic dispersion based on Al:ZnO/ZnO nano-layered structure using Atomic Layer Deposition technique. United States: N. p., Web. doi:10.1364/AO.55.002993.
Kelly, Priscilla, Liu, Mingzhao, & Kuznetsova, Lyuba. Designing optical metamaterial with hyperbolic dispersion based on Al:ZnO/ZnO nano-layered structure using Atomic Layer Deposition technique. United States. doi:10.1364/AO.55.002993.
Kelly, Priscilla, Liu, Mingzhao, and Kuznetsova, Lyuba. 2016. "Designing optical metamaterial with hyperbolic dispersion based on Al:ZnO/ZnO nano-layered structure using Atomic Layer Deposition technique". United States. doi:10.1364/AO.55.002993. https://www.osti.gov/servlets/purl/1247974.
@article{osti_1247974,
title = {Designing optical metamaterial with hyperbolic dispersion based on Al:ZnO/ZnO nano-layered structure using Atomic Layer Deposition technique},
author = {Kelly, Priscilla and Liu, Mingzhao and Kuznetsova, Lyuba},
abstractNote = {In this study, nano-layered Al:ZnO/ZnO hyperbolic dispersion metamaterial with a large number of layers was fabricated using the atomic layer deposition (ALD) technique. Experimental dielectric functions for Al:ZnO/ZnO structures are obtained by an ellipsometry technique in the visible and near-infrared spectral ranges. The theoretical modeling of the Al:ZnO/ZnO dielectric permittivity is done using effective medium approximation. A method for analysis of spectroscopic ellipsometry data is demonstrated to extract the optical permittivity for this highly anisotropic nano-layered metamaterial. The results of the ellipsometry analysis show that Al:ZnO/ZnO structures with a 1:9 ALD cycle ratio exhibit hyperbolic dispersion transition change near 1.8 μm wavelength.},
doi = {10.1364/AO.55.002993},
journal = {Applied Optics},
number = 11,
volume = 55,
place = {United States},
year = {2016},
month = {4}
}