2D fluid-analytical simulation of electromagnetic effects in low pressure, high frequency electronegative capacitive discharges

Kawamura, E.; Lichtenberg, A. J.; Lieberman, M. A.; Marakhtanov, A. M.

doi:10.1088/0963-0252/25/3/035007

Title: 2D fluid-analytical simulation of electromagnetic effects in low pressure, high frequency electronegative capacitive discharges

Journal Article · 06 April 2016 · Plasma Sources Science and Technology

DOI: https://doi.org/10.1088/0963-0252/25/3/035007 · OSTI ID:1245686

Kawamura, E.; Lichtenberg, A. J.; Lieberman, M. A.; Marakhtanov, A. M.

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Sponsoring Organization:: USDOE Office of Science (SC), Fusion Energy Sciences (FES)

Grant/Contract Number:: SC0001939

OSTI ID:: 1245686

Journal Information:: Plasma Sources Science and Technology, Journal Name: Plasma Sources Science and Technology Vol. 25 Journal Issue: 3; ISSN 0963-0252

Publisher:: IOP PublishingCopyright Statement

Country of Publication:: United Kingdom

Language:: English

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Cited by: 13 works

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References (17)

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Shaped electrode and lens for a uniform radio-frequency capacitive plasma Sansonnens, L.; Schmitt, J. Applied Physics Letters, Vol. 82, Issue 2 https://doi.org/10.1063/1.1534918	journal	January 2003
Self-consistent nonlinear transmission line model of standing wave effects in a capacitive discharge Chabert, P.; Raimbault, J. L.; Rax, J. M. Physics of Plasmas, Vol. 11, Issue 5 https://doi.org/10.1063/1.1688334	journal	May 2004
Principles of Plasma Discharges and Materials Processing Lieberman, Michael A.; Lichtenberg, Allan J. https://doi.org/10.1002/0471724254	book	January 2005
Self-consistent simulation of very high frequency capacitively coupled plasmas Rauf, Shahid; Bera, Kallol; Collins, Ken Plasma Sources Science and Technology, Vol. 17, Issue 3 https://doi.org/10.1088/0963-0252/17/3/035003	journal	May 2008
Standing wave and skin effects in large-area, high-frequency capacitive discharges Lieberman, M. A.; Booth, J. P.; Chabert, P. Plasma Sources Science and Technology, Vol. 11, Issue 3 https://doi.org/10.1088/0963-0252/11/3/310	journal	June 2002
Ion flux nonuniformities in large-area high-frequency capacitive discharges Perret, A.; Chabert, P.; Booth, J. -P. Applied Physics Letters, Vol. 83, Issue 2 https://doi.org/10.1063/1.1592617	journal	July 2003
Effect of resonance in external radio-frequency circuit on very high frequency plasma discharge Rauf, Shahid; Chen, Zhigang; Collins, Ken Journal of Applied Physics, Vol. 107, Issue 9 https://doi.org/10.1063/1.3406153	journal	May 2010
Self-consistent electrodynamics of large-area high-frequency capacitive plasma discharge Chen, Zhigang; Rauf, Shahid; Collins, Ken Journal of Applied Physics, Vol. 108, Issue 7 https://doi.org/10.1063/1.3489950	journal	October 2010
Resonance-Sustained Radio Frequency Discharges Taillet, J. American Journal of Physics, Vol. 37, Issue 4 https://doi.org/10.1119/1.1975598	journal	April 1969
Fast 2D hybrid fluid-analytical simulation of inductive/capacitive discharges Kawamura, E.; Graves, D. B.; Lieberman, M. A. Plasma Sources Science and Technology, Vol. 20, Issue 3 https://doi.org/10.1088/0963-0252/20/3/035009	journal	April 2011
Electron series resonant discharges: comparison between simulation and experiment Qiu, W. D.; Bowers, K. J.; Birdsall, C. K. Plasma Sources Science and Technology, Vol. 12, Issue 1 https://doi.org/10.1088/0963-0252/12/1/308	journal	January 2003
The effects of nonlinear series resonance on Ohmic and stochastic heating in capacitive discharges Lieberman, M. A.; Lichtenberg, A. J.; Kawamura, E. Physics of Plasmas, Vol. 15, Issue 6 https://doi.org/10.1063/1.2928847	journal	June 2008
Simulations of electromagnetic effects in high-frequency capacitively coupled discharges using the Darwin approximation Eremin, Denis; Hemke, Torben; Brinkmann, Ralf Peter Journal of Physics D: Applied Physics, Vol. 46, Issue 8 https://doi.org/10.1088/0022-3727/46/8/084017	journal	February 2013
Effect of electromagnetic waves and higher harmonics in capacitively coupled plasma phenomena Upadhyay, R. R.; Sawada, I.; Ventzek, P. L. G. Journal of Physics D: Applied Physics, Vol. 46, Issue 47 https://doi.org/10.1088/0022-3727/46/47/472001	journal	November 2013
Comparison of electrostatic and electromagnetic simulations for very high frequency plasmas Zhang, Yu-Ru; Xu, Xiang; Zhao, Shu-Xia Physics of Plasmas, Vol. 17, Issue 11 https://doi.org/10.1063/1.3519515	journal	November 2010
Enhancement of Ohmic and Stochastic Heating by Resonance Effects in Capacitive Radio Frequency Discharges: A Theoretical Approach Mussenbrock, T.; Brinkmann, R. P.; Lieberman, M. A. Physical Review Letters, Vol. 101, Issue 8 https://doi.org/10.1103/PhysRevLett.101.085004	journal	August 2008

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