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Title: 2D fluid-analytical simulation of electromagnetic effects in low pressure, high frequency electronegative capacitive discharges

Authors:
; ; ;
Publication Date:
Grant/Contract Number:
SC0001939
Type:
Publisher's Accepted Manuscript
Journal Name:
Plasma Sources Science and Technology
Additional Journal Information:
Journal Volume: 25; Journal Issue: 3; Journal ID: ISSN 0963-0252
Publisher:
IOP Publishing
Sponsoring Org:
USDOE Office of Science (SC), Fusion Energy Sciences (FES) (SC-24)
Country of Publication:
United Kingdom
Language:
English
OSTI Identifier:
1245686

Kawamura, E., Lichtenberg, A. J., Lieberman, M. A., and Marakhtanov, A. M.. 2D fluid-analytical simulation of electromagnetic effects in low pressure, high frequency electronegative capacitive discharges. United Kingdom: N. p., Web. doi:10.1088/0963-0252/25/3/035007.
Kawamura, E., Lichtenberg, A. J., Lieberman, M. A., & Marakhtanov, A. M.. 2D fluid-analytical simulation of electromagnetic effects in low pressure, high frequency electronegative capacitive discharges. United Kingdom. doi:10.1088/0963-0252/25/3/035007.
Kawamura, E., Lichtenberg, A. J., Lieberman, M. A., and Marakhtanov, A. M.. 2016. "2D fluid-analytical simulation of electromagnetic effects in low pressure, high frequency electronegative capacitive discharges". United Kingdom. doi:10.1088/0963-0252/25/3/035007.
@article{osti_1245686,
title = {2D fluid-analytical simulation of electromagnetic effects in low pressure, high frequency electronegative capacitive discharges},
author = {Kawamura, E. and Lichtenberg, A. J. and Lieberman, M. A. and Marakhtanov, A. M.},
abstractNote = {},
doi = {10.1088/0963-0252/25/3/035007},
journal = {Plasma Sources Science and Technology},
number = 3,
volume = 25,
place = {United Kingdom},
year = {2016},
month = {4}
}