2D fluid-analytical simulation of electromagnetic effects in low pressure, high frequency electronegative capacitive discharges

Kawamura, E.; Lichtenberg, A. J.; Lieberman, M. A.; Marakhtanov, A. M.

doi:10.1088/0963-0252/25/3/035007

Title: 2D fluid-analytical simulation of electromagnetic effects in low pressure, high frequency electronegative capacitive discharges

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Authors:: Kawamura, E.; Lichtenberg, A. J.; Lieberman, M. A.; Marakhtanov, A. M.

Publication Date:: 2016-04-06

Sponsoring Org.:: USDOE Office of Science (SC), Fusion Energy Sciences (FES)

OSTI Identifier:: 1245686

Grant/Contract Number:: SC0001939

Resource Type:: Publisher's Accepted Manuscript

Journal Name:: Plasma Sources Science and Technology

Additional Journal Information:: Journal Volume: 25; Journal Issue: 3; Journal ID: ISSN 0963-0252

Publisher:: IOP Publishing

Country of Publication:: United Kingdom

Language:: English

Citation Formats


                    Kawamura, E., Lichtenberg, A. J., Lieberman, M. A., and Marakhtanov, A. M. 2D fluid-analytical simulation of electromagnetic effects in low pressure, high frequency electronegative capacitive discharges.  United Kingdom: N. p., 2016. 
Web.  doi:10.1088/0963-0252/25/3/035007.

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                    Kawamura, E., Lichtenberg, A. J., Lieberman, M. A., & Marakhtanov, A. M. 2D fluid-analytical simulation of electromagnetic effects in low pressure, high frequency electronegative capacitive discharges.  United Kingdom.  https://doi.org/10.1088/0963-0252/25/3/035007

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                    Kawamura, E., Lichtenberg, A. J., Lieberman, M. A., and Marakhtanov, A. M. Wed .  
"2D fluid-analytical simulation of electromagnetic effects in low pressure, high frequency electronegative capacitive discharges".  United Kingdom.  https://doi.org/10.1088/0963-0252/25/3/035007.

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@article{osti_1245686,

  title        = {2D fluid-analytical simulation of electromagnetic effects in low pressure, high frequency electronegative capacitive discharges},

  author       = {Kawamura, E. and Lichtenberg, A. J. and Lieberman, M. A. and Marakhtanov, A. M.},

  abstractNote = {},

  doi          = {10.1088/0963-0252/25/3/035007},

  journal      = {Plasma Sources Science and Technology},

  number       = 3,

  volume       = 25,

  place        = {United Kingdom},

  year         = {2016},

  month        = {4}

}

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