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Title: Three-dimensional fabrication of free-standing epitaxial semiconductor nanostructures obtained by focused ion beam

Authors:
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Publication Date:
Type:
Publisher's Accepted Manuscript
Journal Name:
Microelectronic Engineering
Additional Journal Information:
Journal Name: Microelectronic Engineering Journal Volume: 141 Journal Issue: C; Journal ID: ISSN 0167-9317
Publisher:
Elsevier
Sponsoring Org:
USDOE
Country of Publication:
Netherlands
Language:
English
OSTI Identifier:
1245679