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Title: Three-dimensional fabrication of free-standing epitaxial semiconductor nanostructures obtained by focused ion beam

Authors:
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Publication Date:
Grant/Contract Number:
AC02-05CH11231
Type:
Publisher's Accepted Manuscript
Journal Name:
Microelectronic Engineering
Additional Journal Information:
Journal Volume: 141; Journal Issue: C; Related Information: CHORUS Timestamp: 2017-06-21 21:37:53; Journal ID: ISSN 0167-9317
Publisher:
Elsevier
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Country of Publication:
Netherlands
Language:
English
OSTI Identifier:
1245679