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Title: First-principles quantum molecular calculations of structural and mechanical properties of TiN/SiNx heterostructures, and the achievable hardness of the nc-TiN/SiNx nanocomposites

Journal Article · · Thin Solid Films

Sponsoring Organization:
USDOE
Grant/Contract Number:
AC52-07NA27344
OSTI ID:
1245648
Journal Information:
Thin Solid Films, Journal Name: Thin Solid Films Vol. 578 Journal Issue: C; ISSN 0040-6090
Publisher:
ElsevierCopyright Statement
Country of Publication:
Netherlands
Language:
English