skip to main content
DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Atomic-Level Sculpting of Crystalline Oxides: Toward Bulk Nanofabrication with Single Atomic Plane Precision

Abstract

We demonstrate atomic-level sculpting of 3D crystalline oxide nanostructures from metastable amorphous layer in a scanning transmission electron microscope (STEM). Strontium titanate nanostructures grow epitaxially from the crystalline substrate following the beam path. This method can be used for fabricating crystalline structures as small as 1-2 nm and the process can be observed in situ with atomic resolution. We further demonstrate fabrication of arbitrary shape structures via control of the position and scan speed of the electron beam. Combined with broad availability of the atomic resolved electron microscopy platforms, these observations suggest the feasibility of large scale implementation of bulk atomic-level fabrication as a new enabling tool of nanoscience and technology, providing a bottom-up, atomic-level complement to 3D printing.

Authors:
 [1];  [1];  [2];  [3];  [4];  [5];  [6];  [1];  [7];  [8];  [9];  [1];  [10]
  1. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Inst. for Functional Imaging of Materials and Center for Nanophase Materials Science
  2. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Inst. for Functional Imaging of Materials and Materials Sciences and Technology Division
  3. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Materials Sciences and Technology Division
  4. Vanderbilt Univ., Nashville, TN (United States). Dept. of Physics and Astronomy,
  5. Oak Ridge National Lab., Oak Ridge TN (United States). Inst. for Functional Imaging of Materials; Vanderbilt Univ., Nashville, TN (United States). Dept. of Physics and Astronomy,
  6. Oak Ridge National Lab., Oak Ridge TN (United States). Inst. for Functional Imaging of Materials and Center for Nanophase Materials Sciences
  7. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Science and Computer Science and Mathematics Division
  8. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Inst. for Functional Imaging of Materials, Center for Nanophase Materials Science, and Computer Science and Mathematics Division
  9. National Univ. of Singapore, Singapore (Singapore). Dept. of Materials Science and Engineering
  10. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Inst. for Functional Imaging of Materials, Center for Nanophase Materials Science, and Materials Sciences and Technology Division
Publication Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Oak Ridge Leadership Computing Facility (OLCF)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1240550
Grant/Contract Number:  
AC05-00OR22725
Resource Type:
Accepted Manuscript
Journal Name:
Small
Additional Journal Information:
Journal Volume: 11; Journal Issue: 44; Journal ID: ISSN 1613-6810
Publisher:
Wiley
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY; atomic-level sculpting; complex oxides; epitaxy; electron beam; patterning; microscopy

Citation Formats

Jesse, Stephen, He, Qian, Lupini, Andrew R., Leonard, Donovan N., Oxley, Mark P., Ovchinnikov, Oleg, Unocic, Raymond R., Tselev, Alexander, Fuentes-Cabrera, Miguel, Sumpter, Bobby G., Pennycook, Stephen J., Kalinin, Sergei V., and Borisevich, Albina Y. Atomic-Level Sculpting of Crystalline Oxides: Toward Bulk Nanofabrication with Single Atomic Plane Precision. United States: N. p., 2015. Web. doi:10.1002/smll.201502048.
Jesse, Stephen, He, Qian, Lupini, Andrew R., Leonard, Donovan N., Oxley, Mark P., Ovchinnikov, Oleg, Unocic, Raymond R., Tselev, Alexander, Fuentes-Cabrera, Miguel, Sumpter, Bobby G., Pennycook, Stephen J., Kalinin, Sergei V., & Borisevich, Albina Y. Atomic-Level Sculpting of Crystalline Oxides: Toward Bulk Nanofabrication with Single Atomic Plane Precision. United States. doi:10.1002/smll.201502048.
Jesse, Stephen, He, Qian, Lupini, Andrew R., Leonard, Donovan N., Oxley, Mark P., Ovchinnikov, Oleg, Unocic, Raymond R., Tselev, Alexander, Fuentes-Cabrera, Miguel, Sumpter, Bobby G., Pennycook, Stephen J., Kalinin, Sergei V., and Borisevich, Albina Y. Mon . "Atomic-Level Sculpting of Crystalline Oxides: Toward Bulk Nanofabrication with Single Atomic Plane Precision". United States. doi:10.1002/smll.201502048. https://www.osti.gov/servlets/purl/1240550.
@article{osti_1240550,
title = {Atomic-Level Sculpting of Crystalline Oxides: Toward Bulk Nanofabrication with Single Atomic Plane Precision},
author = {Jesse, Stephen and He, Qian and Lupini, Andrew R. and Leonard, Donovan N. and Oxley, Mark P. and Ovchinnikov, Oleg and Unocic, Raymond R. and Tselev, Alexander and Fuentes-Cabrera, Miguel and Sumpter, Bobby G. and Pennycook, Stephen J. and Kalinin, Sergei V. and Borisevich, Albina Y.},
abstractNote = {We demonstrate atomic-level sculpting of 3D crystalline oxide nanostructures from metastable amorphous layer in a scanning transmission electron microscope (STEM). Strontium titanate nanostructures grow epitaxially from the crystalline substrate following the beam path. This method can be used for fabricating crystalline structures as small as 1-2 nm and the process can be observed in situ with atomic resolution. We further demonstrate fabrication of arbitrary shape structures via control of the position and scan speed of the electron beam. Combined with broad availability of the atomic resolved electron microscopy platforms, these observations suggest the feasibility of large scale implementation of bulk atomic-level fabrication as a new enabling tool of nanoscience and technology, providing a bottom-up, atomic-level complement to 3D printing.},
doi = {10.1002/smll.201502048},
journal = {Small},
number = 44,
volume = 11,
place = {United States},
year = {2015},
month = {10}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record

Citation Metrics:
Cited by: 14 works
Citation information provided by
Web of Science

Save / Share:

Works referenced in this record:

Confinement of Electrons to Quantum Corrals on a Metal Surface
journal, October 1993


Atom inlays performed at room temperature using atomic force microscopy
journal, January 2005

  • Sugimoto, Yoshiaki; Abe, Masayuki; Hirayama, Shinji
  • Nature Materials, Vol. 4, Issue 2
  • DOI: 10.1038/nmat1297

A review of focused ion beam milling techniques for TEM specimen preparation
journal, June 1999


Electron-irradiation-induced nucleation and growth in amorphous LaPO 4 , ScPO 4 , and zircon
journal, July 1997

  • Meldrum, A.; Boatner, L. A.; Ewing, R. C.
  • Journal of Materials Research, Vol. 12, Issue 7
  • DOI: 10.1557/JMR.1997.0250

Nanofabrication by electron beam lithography and its applications: A review
journal, March 2015


Ion-induced damage accumulation and electron-beam-enhanced recrystallization in Sr Ti O 3
journal, September 2005


An atomic switch realized with the scanning tunnelling microscope
journal, August 1991

  • Eigler, D. M.; Lutz, C. P.; Rudge, W. E.
  • Nature, Vol. 352, Issue 6336
  • DOI: 10.1038/352600a0

The effect of annealing environments on the epitaxial recrystallization of ion-beam-amorphized SrTiO 3
journal, March 1992

  • Rankin, J.; McCallum, J. C.; Boatner, L. A.
  • Journal of Materials Research, Vol. 7, Issue 3
  • DOI: 10.1557/JMR.1992.0717

Molecule Cascades
journal, October 2002


Oxide Interfaces--An Opportunity for Electronics
journal, March 2010


TEM Sample Preparation and FIB-Induced Damage
journal, May 2007

  • Mayer, Joachim; Giannuzzi, Lucille A.; Kamino, Takeo
  • MRS Bulletin, Vol. 32, Issue 5
  • DOI: 10.1557/mrs2007.63

Iron Particle Nanodrilling of Few Layer Graphene at Low Electron Beam Accelerating Voltages
journal, November 2012

  • Campos-Delgado, Jessica; Baptista, Daniel L.; Fuentes-Cabrera, Miguel
  • Particle & Particle Systems Characterization, Vol. 30, Issue 1
  • DOI: 10.1002/ppsc.201200041

Molecular dynamics simulation of thermodynamic and thermal transport properties of strontium titanate with improved potential parameters
journal, July 2012


Fast Parallel Algorithms for Short-Range Molecular Dynamics
journal, March 1995


Atomic force microscopy as a tool for atom manipulation
journal, December 2009

  • Custance, Oscar; Perez, Ruben; Morita, Seizo
  • Nature Nanotechnology, Vol. 4, Issue 12
  • DOI: 10.1038/nnano.2009.347

35 atoms that changed the nanoworld
journal, March 2010


Electron beam lithography—Resolution limits
journal, September 1996


Flexible metallic nanowires with self-adaptive contacts to semiconducting transition-metal dichalcogenide monolayers
journal, April 2014


Solid-phase-epitaxial growth and formation of metastable alloys in ion implanted silicon
journal, January 1983

  • Narayan, J.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 1, Issue 4
  • DOI: 10.1116/1.582708

Radiation damage in the TEM and SEM
journal, August 2004


Atomic-Scale Electron-Beam Sculpting of Near-Defect-Free Graphene Nanostructures
journal, June 2011

  • Song, Bo; Schneider, Grégory F.; Xu, Qiang
  • Nano Letters, Vol. 11, Issue 6
  • DOI: 10.1021/nl200369r

Emergent phenomena at oxide interfaces
journal, January 2012

  • Hwang, H. Y.; Iwasa, Y.; Kawasaki, M.
  • Nature Materials, Vol. 11, Issue 2
  • DOI: 10.1038/nmat3223

Electron beam nanosculpting of suspended graphene sheets
journal, September 2008

  • Fischbein, Michael D.; Drndić, Marija
  • Applied Physics Letters, Vol. 93, Issue 11, Article No. 113107
  • DOI: 10.1063/1.2980518

Single-atom gating of quantum-state superpositions
journal, April 2008

  • Moon, Christopher R.; Lutz, Christopher P.; Manoharan, Hari C.
  • Nature Physics, Vol. 4, Issue 6
  • DOI: 10.1038/nphys930

Graphene at the Edge: Stability and Dynamics
journal, March 2009


Defects and transport in complex oxide thin films
journal, May 2008

  • Ohnishi, Tsuyoshi; Shibuya, Keisuke; Yamamoto, Takahisa
  • Journal of Applied Physics, Vol. 103, Issue 10
  • DOI: 10.1063/1.2921972

Imaging standing waves in a two-dimensional electron gas
journal, June 1993

  • Crommie, M. F.; Lutz, C. P.; Eigler, D. M.
  • Nature, Vol. 363, Issue 6429
  • DOI: 10.1038/363524a0

Electron‐beam‐induced crystallization of isolated amorphous regions in Si, Ge, GaP, and GaAs
journal, July 1995

  • Jenc̆ic̆, I.; Bench, M. W.; Robertson, I. M.
  • Journal of Applied Physics, Vol. 78, Issue 2
  • DOI: 10.1063/1.360764

Controllable Atomic Scale Patterning of Freestanding Monolayer Graphene at Elevated Temperature
journal, January 2013

  • Xu, Qiang; Wu, Meng-Yue; Schneider, Grégory F.
  • ACS Nano, Vol. 7, Issue 2
  • DOI: 10.1021/nn3053582

Electron-beam-assisted superplastic shaping of nanoscale amorphous silica
journal, June 2010

  • Zheng, Kun; Wang, Chengcai; Cheng, Yong-Qiang
  • Nature Communications, Vol. 1, Issue 1
  • DOI: 10.1038/ncomms1021

Positioning single atoms with a scanning tunnelling microscope
journal, April 1990

  • Eigler, D. M.; Schweizer, E. K.
  • Nature, Vol. 344, Issue 6266
  • DOI: 10.1038/344524a0