Application of sub-micrometer patterned permalloy thin film in tunable radio frequency inductors
Abstract
Electrical tunable meander line inductor using coplanar waveguide structures with patterned permalloy (Py) thin film has been designed and implemented in this paper. High resistivity Si substrate is used to reduce the dielectric loss from the substrate. Inductor is implemented with a 60 nm thick Py deposited and patterned on top of the gold meander line, and Py film is patterned with dimension of 440 nm 10 lm to create the shape anisotropy field, which in turn increases the FMR frequency. Compared to a regular meanderline inductor without the application of sub-micrometer patterned Py thin film, the inductance density has been increased to 20% for the implemented inductor with patterned Py. Measured FMR frequency of the patterned Py is 4.51 GHz without the application of any external magnetic field. This has enabled the inductor application in the practical circuit boards, where the large external magnet is unavailable. Inductance tunability of the implemented inductor is demonstrated by applying a DC current. Applied DC current creates a magnetic field along the hard axis of the patterned Py thin film, which changes the magnetic moment of the thin film and thus, decreases the inductance of the line. Here, the measured results show thatmore »
- Authors:
-
[3];
[3]
- Intel Corp., Hillsboro, OR (United States)
- Argonne National Lab. (ANL), Lemont, IL (United States)
- Univ. of South Carolina, Columbia, SC (United States)
- Publication Date:
- Research Org.:
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- National Science Foundation (NSF); USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1239556
- Grant/Contract Number:
- AC02-06CH11357; 125392
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Journal of Applied Physics
- Additional Journal Information:
- Journal Volume: 117; Journal Issue: 17; Journal ID: ISSN 0021-8979
- Publisher:
- American Institute of Physics (AIP)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Rahman, B. M. Farid, Divan, Ralu, Rosenmann, Daniel, Wang, Tengxing, Peng, Yujia, and Wang, Guoan. Application of sub-micrometer patterned permalloy thin film in tunable radio frequency inductors. United States: N. p., 2015.
Web. doi:10.1063/1.4918766.
Rahman, B. M. Farid, Divan, Ralu, Rosenmann, Daniel, Wang, Tengxing, Peng, Yujia, & Wang, Guoan. Application of sub-micrometer patterned permalloy thin film in tunable radio frequency inductors. United States. https://doi.org/10.1063/1.4918766
Rahman, B. M. Farid, Divan, Ralu, Rosenmann, Daniel, Wang, Tengxing, Peng, Yujia, and Wang, Guoan. Tue .
"Application of sub-micrometer patterned permalloy thin film in tunable radio frequency inductors". United States. https://doi.org/10.1063/1.4918766. https://www.osti.gov/servlets/purl/1239556.
@article{osti_1239556,
title = {Application of sub-micrometer patterned permalloy thin film in tunable radio frequency inductors},
author = {Rahman, B. M. Farid and Divan, Ralu and Rosenmann, Daniel and Wang, Tengxing and Peng, Yujia and Wang, Guoan},
abstractNote = {Electrical tunable meander line inductor using coplanar waveguide structures with patterned permalloy (Py) thin film has been designed and implemented in this paper. High resistivity Si substrate is used to reduce the dielectric loss from the substrate. Inductor is implemented with a 60 nm thick Py deposited and patterned on top of the gold meander line, and Py film is patterned with dimension of 440 nm 10 lm to create the shape anisotropy field, which in turn increases the FMR frequency. Compared to a regular meanderline inductor without the application of sub-micrometer patterned Py thin film, the inductance density has been increased to 20% for the implemented inductor with patterned Py. Measured FMR frequency of the patterned Py is 4.51 GHz without the application of any external magnetic field. This has enabled the inductor application in the practical circuit boards, where the large external magnet is unavailable. Inductance tunability of the implemented inductor is demonstrated by applying a DC current. Applied DC current creates a magnetic field along the hard axis of the patterned Py thin film, which changes the magnetic moment of the thin film and thus, decreases the inductance of the line. Here, the measured results show that the inductance density of the inductor can be varied 5% by applying 300 mA DC current, larger inductance tunability is achievable by increasing the thickness of Py film.},
doi = {10.1063/1.4918766},
journal = {Journal of Applied Physics},
number = 17,
volume = 117,
place = {United States},
year = {Tue Apr 21 00:00:00 EDT 2015},
month = {Tue Apr 21 00:00:00 EDT 2015}
}
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Works referencing / citing this record:
Voltage-Impulse-Induced Nonvolatile Control of Inductance in Tunable Magnetoelectric Inductors
journal, April 2017
- Peng, Bin; Zhang, Chenxi; Yan, Yuan
- Physical Review Applied, Vol. 7, Issue 4