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Title: Nonlinear standing wave excitation by series resonance-enhanced harmonics in low pressure capacitive discharges

Authors:
; ; ;
Publication Date:
Grant/Contract Number:
SC000193
Type:
Publisher's Accepted Manuscript
Journal Name:
Plasma Sources Science and Technology
Additional Journal Information:
Journal Volume: 24; Journal Issue: 5; Journal ID: ISSN 0963-0252
Publisher:
IOP Publishing
Sponsoring Org:
USDOE Office of Science (SC), Fusion Energy Sciences (FES) (SC-24)
Country of Publication:
United Kingdom
Language:
English
OSTI Identifier:
1239007

Lieberman, M. A., Lichtenberg, A. J., Kawamura, E., and Marakhtanov, A. M.. Nonlinear standing wave excitation by series resonance-enhanced harmonics in low pressure capacitive discharges. United Kingdom: N. p., Web. doi:10.1088/0963-0252/24/5/055011.
Lieberman, M. A., Lichtenberg, A. J., Kawamura, E., & Marakhtanov, A. M.. Nonlinear standing wave excitation by series resonance-enhanced harmonics in low pressure capacitive discharges. United Kingdom. doi:10.1088/0963-0252/24/5/055011.
Lieberman, M. A., Lichtenberg, A. J., Kawamura, E., and Marakhtanov, A. M.. 2015. "Nonlinear standing wave excitation by series resonance-enhanced harmonics in low pressure capacitive discharges". United Kingdom. doi:10.1088/0963-0252/24/5/055011.
@article{osti_1239007,
title = {Nonlinear standing wave excitation by series resonance-enhanced harmonics in low pressure capacitive discharges},
author = {Lieberman, M. A. and Lichtenberg, A. J. and Kawamura, E. and Marakhtanov, A. M.},
abstractNote = {},
doi = {10.1088/0963-0252/24/5/055011},
journal = {Plasma Sources Science and Technology},
number = 5,
volume = 24,
place = {United Kingdom},
year = {2015},
month = {8}
}