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Title: MEMS closed-loop control incorporating a memristor as feedback sensing element

In this work the integration of a memristor with a MEMS parallel plate capacitor coupled by an amplification stage is simulated. It is shown that the MEMS upper plate position can be controlled up to 95% of the total gap. Due to its common operation principle, the change in the MEMS plate position can be interpreted by the change in the memristor resistance, or memristance. A memristance modulation of ~1 KΩ was observed. A polynomial expression representing the MEMS upper plate displacement as a function of the memristance is presented. Thereafter a simple design for a voltage closed-loop control is presented showing that the MEMS upper plate can be stabilized up to 95% of the total gap using the memristor as a feedback sensing element. As a result, the memristor can play important dual roles in overcoming the limited operation range of MEMS parallel plate capacitors and in simplifying read-out circuits of those devices by representing the motion of the upper plate in the form of resistance change instead of capacitance change.
 [1] ;  [2] ;  [3] ;  [2]
  1. Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
  2. Univ. of Texas, El Paso, TX (United States)
  3. Univ. Autonoma de Ciudad Juarez (Mexico)
Publication Date:
Report Number(s):
Journal ID: ISSN 1549-7747; 607298
Grant/Contract Number:
Accepted Manuscript
Journal Name:
IEEE Transactions on Circuits and Systems. II, Express Briefs
Additional Journal Information:
Journal Volume: 63; Journal Issue: 3; Journal ID: ISSN 1549-7747
Research Org:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
USDOE National Nuclear Security Administration (NNSA)
Country of Publication:
United States
42 ENGINEERING; 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; memristor; MEMS; micromechanical devices; circuit simulation; closed-loop control; feedback
OSTI Identifier: