Evidence for breathing modes in direct current, pulsed, and high power impulse magnetron sputtering plasmas
- Publication Date:
- Grant/Contract Number:
- AC02-05CH11231
- Type:
- Publisher's Accepted Manuscript
- Journal Name:
- Applied Physics Letters
- Additional Journal Information:
- Journal Volume: 108; Journal Issue: 3; Related Information: CHORUS Timestamp: 2016-12-29 10:56:29; Journal ID: ISSN 0003-6951
- Publisher:
- American Institute of Physics
- Sponsoring Org:
- USDOE
- Country of Publication:
- United States
- Language:
- English
- OSTI Identifier:
- 1235378