Evidence for breathing modes in direct current, pulsed, and high power impulse magnetron sputtering plasmas
- Authors:
-
[1]
; [2]
; [3]
; [4]
- State Key Lab for Materials Processing and Die & Mold Technology, School of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
- Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA, Department of Electrical Engineering, Harbin Institute of Technology, Harbin 150000, China
- Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA, Department of Physics, University of California, Berkeley, Berkeley, California 94720, USA
- Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
- Publication Date:
- Grant/Contract Number:
- AC02-05CH11231
- Type:
- Publisher's Accepted Manuscript
- Journal Name:
- Applied Physics Letters
- Additional Journal Information:
- Journal Volume: 108; Journal Issue: 3; Related Information: CHORUS Timestamp: 2018-03-29 14:50:02; Journal ID: ISSN 0003-6951
- Publisher:
- American Institute of Physics
- Sponsoring Org:
- USDOE
- Country of Publication:
- United States
- Language:
- English
- OSTI Identifier:
- 1235378