Evidence for breathing modes in direct current, pulsed, and high power impulse magnetron sputtering plasmas
- Authors:
-
[1];
[4]
- State Key Lab for Materials Processing and Die & Mold Technology, School of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
- Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA, Department of Electrical Engineering, Harbin Institute of Technology, Harbin 150000, China
- Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA, Department of Physics, University of California, Berkeley, Berkeley, California 94720, USA
- Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
- Publication Date:
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1235378
- Grant/Contract Number:
- AC02-05CH11231
- Resource Type:
- Publisher's Accepted Manuscript
- Journal Name:
- Applied Physics Letters
- Additional Journal Information:
- Journal Name: Applied Physics Letters Journal Volume: 108 Journal Issue: 3; Journal ID: ISSN 0003-6951
- Publisher:
- American Institute of Physics
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Yang, Yuchen, Zhou, Xue, Liu, Jason X., and Anders, André. Evidence for breathing modes in direct current, pulsed, and high power impulse magnetron sputtering plasmas. United States: N. p., 2016.
Web. doi:10.1063/1.4939922.
Yang, Yuchen, Zhou, Xue, Liu, Jason X., & Anders, André. Evidence for breathing modes in direct current, pulsed, and high power impulse magnetron sputtering plasmas. United States. doi:10.1063/1.4939922.
Yang, Yuchen, Zhou, Xue, Liu, Jason X., and Anders, André. Tue .
"Evidence for breathing modes in direct current, pulsed, and high power impulse magnetron sputtering plasmas". United States. doi:10.1063/1.4939922.
@article{osti_1235378,
title = {Evidence for breathing modes in direct current, pulsed, and high power impulse magnetron sputtering plasmas},
author = {Yang, Yuchen and Zhou, Xue and Liu, Jason X. and Anders, André},
abstractNote = {},
doi = {10.1063/1.4939922},
journal = {Applied Physics Letters},
number = 3,
volume = 108,
place = {United States},
year = {2016},
month = {1}
}
Free Publicly Available Full Text
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DOI: 10.1063/1.4939922
DOI: 10.1063/1.4939922
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Works referenced in this record:
Global Stability Analysis of Azimuthal Oscillations in Hall Thrusters
journal, January 2015
- Escobar, Diego; Ahedo, Eduardo
- IEEE Transactions on Plasma Science, Vol. 43, Issue 1
Self-organization in planar magnetron microdischarge plasmas
journal, June 2015
- Ito, Tsuyohito; Young, Christopher V.; Cappelli, Mark A.
- Applied Physics Letters, Vol. 106, Issue 25
Optical studies of plasma inhomogeneities in a high-current pulsed magnetron discharge
journal, July 2011
- Kozyrev, A. V.; Sochugov, N. S.; Oskomov, K. V.
- Plasma Physics Reports, Vol. 37, Issue 7
Magnetron sputtering: basic physics and application to cylindrical magnetrons
journal, March 1978
- Thornton, John A.
- Journal of Vacuum Science and Technology, Vol. 15, Issue 2
Spoke transitions in HiPIMS discharges
journal, June 2015
- Hecimovic, A.; Schulz-von der Gathen, V.; Böke, M.
- Plasma Sources Science and Technology, Vol. 24, Issue 4
Spatial and temporal behavior of the plasma parameters in a pulsed magnetron discharge
journal, December 2002
- Gudmundsson, J. T.; Alami, J.; Helmersson, U.
- Surface and Coatings Technology, Vol. 161, Issue 2-3
Transition in electron transport in a cylindrical Hall thruster
journal, August 2010
- Parker, J. B.; Raitses, Y.; Fisch, N. J.
- Applied Physics Letters, Vol. 97, Issue 9
Faster-than-Bohm Cross- Electron Transport in Strongly Pulsed Plasmas
journal, November 2009
- Brenning, N.; Merlino, R. L.; Lundin, D.
- Physical Review Letters, Vol. 103, Issue 22
The ‘recycling trap’: a generalized explanation of discharge runaway in high-power impulse magnetron sputtering
journal, December 2011
- Anders, A.; Čapek, J.; Hála, M.
- Journal of Physics D: Applied Physics, Vol. 45, Issue 1
Drifting localization of ionization runaway: Unraveling the nature of anomalous transport in high power impulse magnetron sputtering
journal, March 2012
- Anders, André; Ni, Pavel; Rauch, Albert
- Journal of Applied Physics, Vol. 111, Issue 5
Ion energies in high power impulse magnetron sputtering with and without localized ionization zones
journal, March 2015
- Yang, Yuchen; Tanaka, Koichi; Liu, Jason
- Applied Physics Letters, Vol. 106, Issue 12
Current–voltage characteristics and fast imaging of HPPMS plasmas: transition from self-organized to homogeneous plasma regimes
journal, July 2013
- Arcos, T. de los; Layes, V.; Gonzalvo, Y. Aranda
- Journal of Physics D: Applied Physics, Vol. 46, Issue 33
Low‐frequency turbulent transport in magnetron plasmas
journal, May 1989
- Sheridan, T. E.; Goree, J.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 7, Issue 3
The characteristic shape of emission profiles of plasma spokes in HiPIMS: the role of secondary electrons
journal, February 2014
- Hecimovic, A.; Böke, M.; Winter, J.
- Journal of Physics D: Applied Physics, Vol. 47, Issue 10
Ion dynamics in an E × B Hall plasma accelerator
journal, January 2015
- Young, Christopher V.; Lucca Fabris, Andrea; Cappelli, Mark A.
- Applied Physics Letters, Vol. 106, Issue 4
Low frequency oscillations in a stationary plasma thruster
journal, October 1998
- Boeuf, J. P.; Garrigues, L.
- Journal of Applied Physics, Vol. 84, Issue 7
Azimuthal Spoke Propagation in Hall Effect Thrusters
journal, January 2015
- Sekerak, Michael J.; Longmier, Benjamin W.; Gallimore, Alec D.
- IEEE Transactions on Plasma Science, Vol. 43, Issue 1
Plasma oscillations in Hall thrusters
journal, January 2001
- Choueiri, E. Y.
- Physics of Plasmas, Vol. 8, Issue 4
Plasma flares in high power impulse magnetron sputtering
journal, November 2012
- Ni, Pavel A.; Hornschuch, Christian; Panjan, Matjaž
- Applied Physics Letters, Vol. 101, Issue 22
Low-frequency model of breathing oscillations in Hall discharges
journal, April 2009
- Barral, Serge; Ahedo, Eduardo
- Physical Review E, Vol. 79, Issue 4
Propagation direction reversal of ionization zones in the transition between high and low current magnetron sputtering
journal, December 2014
- Yang, Yuchen; Liu, Jason; Liu, Lin
- Applied Physics Letters, Vol. 105, Issue 25