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Title: Fully 3D-Integrated Pixel Detectors for X-Rays

The vertically integrated photon imaging chip (VIPIC1) pixel detector is a stack consisting of a 500-μm-thick silicon sensor, a two-tier 34-μm-thick integrated circuit, and a host printed circuit board (PCB). The integrated circuit tiers were bonded using the direct bonding technology with copper, and each tier features 1-μm-diameter through-silicon vias that were used for connections to the sensor on one side, and to the host PCB on the other side. The 80-μm-pixel-pitch sensor was the direct bonding technology with nickel bonded to the integrated circuit. The stack was mounted on the board using Sn–Pb balls placed on a 320-μm pitch, yielding an entirely wire-bond-less structure. The analog front-end features a pulse response peaking at below 250 ns, and the power consumption per pixel is 25 μW. We successful completed the 3-D integration and have reported here. Additionally, all pixels in the matrix of 64 × 64 pixels were responding on well-bonded devices. Correct operation of the sparsified readout, allowing a single 153-ns bunch timing resolution, was confirmed in the tests on a synchrotron beam of 10-keV X-rays. An equivalent noise charge of 36.2 e - rms and a conversion gain of 69.5 μV/e - with 2.6 e - rms andmore » 2.7 μV/e - rms pixel-to-pixel variations, respectively, were measured.« less
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  1. Fermi National Accelerator Lab. (FNAL), Batavia, IL (United States)
  2. SLAC National Accelerator Lab., Menlo Park, CA (United States)
Publication Date:
Report Number(s):
Journal ID: ISSN 0018-9383
Grant/Contract Number:
Accepted Manuscript
Journal Name:
IEEE Transactions on Electron Devices
Additional Journal Information:
Journal Volume: 63; Journal Issue: 1; Journal ID: ISSN 0018-9383
Research Org:
Fermi National Accelerator Lab. (FNAL), Batavia, IL (United States)
Sponsoring Org:
USDOE Office of Science (SC), High Energy Physics (HEP) (SC-25)
Country of Publication:
United States
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; CMOS integrated circuits; 3D integration; image sensors; pixel detectors; X-ray detectors
OSTI Identifier: