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Title: External control of electron energy distributions in a dual tandem inductively coupled plasma

Authors:
ORCiD logo [1] ;  [1] ;  [1] ;  [1] ;  [1] ; ORCiD logo [2] ;  [2]
  1. Plasma Processing Laboratory, Department of Chemical and Biomolecular Engineering, University of Houston, Houston, Texas 77204-4004, USA
  2. Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, Michigan 48109-2122, USA
Publication Date:
Grant/Contract Number:
SC0001939
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Name: Journal of Applied Physics Journal Volume: 118 Journal Issue: 8; Journal ID: ISSN 0021-8979
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1229647

Liu, Lei, Sridhar, Shyam, Zhu, Weiye, Donnelly, Vincent M., Economou, Demetre J., Logue, Michael D., and Kushner, Mark J.. External control of electron energy distributions in a dual tandem inductively coupled plasma. United States: N. p., Web. doi:10.1063/1.4928870.
Liu, Lei, Sridhar, Shyam, Zhu, Weiye, Donnelly, Vincent M., Economou, Demetre J., Logue, Michael D., & Kushner, Mark J.. External control of electron energy distributions in a dual tandem inductively coupled plasma. United States. doi:10.1063/1.4928870.
Liu, Lei, Sridhar, Shyam, Zhu, Weiye, Donnelly, Vincent M., Economou, Demetre J., Logue, Michael D., and Kushner, Mark J.. 2015. "External control of electron energy distributions in a dual tandem inductively coupled plasma". United States. doi:10.1063/1.4928870.
@article{osti_1229647,
title = {External control of electron energy distributions in a dual tandem inductively coupled plasma},
author = {Liu, Lei and Sridhar, Shyam and Zhu, Weiye and Donnelly, Vincent M. and Economou, Demetre J. and Logue, Michael D. and Kushner, Mark J.},
abstractNote = {},
doi = {10.1063/1.4928870},
journal = {Journal of Applied Physics},
number = 8,
volume = 118,
place = {United States},
year = {2015},
month = {8}
}