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Title: External control of electron energy distributions in a dual tandem inductively coupled plasma

Authors:
ORCiD logo ; ; ; ; ; ORCiD logo ;
Publication Date:
Grant/Contract Number:
SC0001939
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 118; Journal Issue: 8; Related Information: CHORUS Timestamp: 2016-12-26 18:11:54; Journal ID: ISSN 0021-8979
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1229647