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Title: Catalyst synthesis and evaluation using an integrated atomic layer deposition synthesis–catalysis testing tool

Abstract

An integrated atomic layer deposition-catalysis (I-ALD-CAT) tool was developed, combining an ALD manifold with a plug-flow reactor system for the synthesis of supported catalytic materials by ALD and immediate evaluation of catalyst reactivity using gas-phase probe reactions. The I-ALD-CAT system can deliver gaseous reagents comprised of 12 different metal ALD precursors, 4 oxidizing or reducing agents, and 4 catalytic reaction feeds to either of the two plug-flow reactors. The system can employ reactor pressures and temperatures in the range of 10-3 to 1 bar and 300–1000 K, respectively. Furthermore, the instrument is also equipped with a gas chromatograph and a mass spectrometer unit for the detection and quantification of volatile species from ALD and catalytic reactions. In this report, we demonstrate the use of the I-ALD-CAT tool for the ALD of platinum active sites and Al2O3 overcoats, and evaluation of catalyst propylene hydrogenation activity.

Authors:
 [1];  [1];  [2];  [3];  [3];  [3]; ORCiD logo [1];  [4];  [5]
  1. Argonne National Lab. (ANL), Lemont, IL (United States)
  2. Argonne National Lab. (ANL), Lemont, IL (United States); Univ. of Illinois, Chicago, IL (United States)
  3. Arradiance Inc., Sudbury, MA (United States)
  4. Argonne National Lab. (ANL), Lemont, IL (United States); Illinois Inst. of Technology, Chicago, IL (United States)
  5. Argonne National Lab. (ANL), Lemont, IL (United States); Northwestern Univ., Evanston, IL (United States)
Publication Date:
Research Org.:
Argonne National Laboratory (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES). Chemical Sciences, Geosciences, and Biosciences Division
OSTI Identifier:
1391821
Alternate Identifier(s):
OSTI ID: 1229634
Grant/Contract Number:  
AC02-06CH11357; AC-02-06CH11357
Resource Type:
Accepted Manuscript
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 86; Journal Issue: 8; Journal ID: ISSN 0034-6748
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Camacho-Bunquin, Jeffrey, Shou, Heng, Aich, Payoli, Beaulieu, David R., Klotzsch, Helmut, Bachman, Stephen, Marshall, Christopher L., Hock, Adam, and Stair, Peter. Catalyst synthesis and evaluation using an integrated atomic layer deposition synthesis–catalysis testing tool. United States: N. p., 2015. Web. doi:10.1063/1.4928614.
Camacho-Bunquin, Jeffrey, Shou, Heng, Aich, Payoli, Beaulieu, David R., Klotzsch, Helmut, Bachman, Stephen, Marshall, Christopher L., Hock, Adam, & Stair, Peter. Catalyst synthesis and evaluation using an integrated atomic layer deposition synthesis–catalysis testing tool. United States. https://doi.org/10.1063/1.4928614
Camacho-Bunquin, Jeffrey, Shou, Heng, Aich, Payoli, Beaulieu, David R., Klotzsch, Helmut, Bachman, Stephen, Marshall, Christopher L., Hock, Adam, and Stair, Peter. Mon . "Catalyst synthesis and evaluation using an integrated atomic layer deposition synthesis–catalysis testing tool". United States. https://doi.org/10.1063/1.4928614. https://www.osti.gov/servlets/purl/1391821.
@article{osti_1391821,
title = {Catalyst synthesis and evaluation using an integrated atomic layer deposition synthesis–catalysis testing tool},
author = {Camacho-Bunquin, Jeffrey and Shou, Heng and Aich, Payoli and Beaulieu, David R. and Klotzsch, Helmut and Bachman, Stephen and Marshall, Christopher L. and Hock, Adam and Stair, Peter},
abstractNote = {An integrated atomic layer deposition-catalysis (I-ALD-CAT) tool was developed, combining an ALD manifold with a plug-flow reactor system for the synthesis of supported catalytic materials by ALD and immediate evaluation of catalyst reactivity using gas-phase probe reactions. The I-ALD-CAT system can deliver gaseous reagents comprised of 12 different metal ALD precursors, 4 oxidizing or reducing agents, and 4 catalytic reaction feeds to either of the two plug-flow reactors. The system can employ reactor pressures and temperatures in the range of 10-3 to 1 bar and 300–1000 K, respectively. Furthermore, the instrument is also equipped with a gas chromatograph and a mass spectrometer unit for the detection and quantification of volatile species from ALD and catalytic reactions. In this report, we demonstrate the use of the I-ALD-CAT tool for the ALD of platinum active sites and Al2O3 overcoats, and evaluation of catalyst propylene hydrogenation activity.},
doi = {10.1063/1.4928614},
journal = {Review of Scientific Instruments},
number = 8,
volume = 86,
place = {United States},
year = {Mon Aug 24 00:00:00 EDT 2015},
month = {Mon Aug 24 00:00:00 EDT 2015}
}

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Cited by: 17 works
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Works referencing / citing this record:

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