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Title: Localized heating of electrons in ionization zones: Going beyond the Penning-Thornton paradigm in magnetron sputtering

Authors:
ORCiD logo [1]
  1. Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1226614
Grant/Contract Number:  
AC02-05CH11231
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Name: Applied Physics Letters Journal Volume: 105 Journal Issue: 24; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics
Country of Publication:
United States
Language:
English

Citation Formats

Anders, André. Localized heating of electrons in ionization zones: Going beyond the Penning-Thornton paradigm in magnetron sputtering. United States: N. p., 2014. Web. doi:10.1063/1.4904713.
Anders, André. Localized heating of electrons in ionization zones: Going beyond the Penning-Thornton paradigm in magnetron sputtering. United States. https://doi.org/10.1063/1.4904713
Anders, André. Tue . "Localized heating of electrons in ionization zones: Going beyond the Penning-Thornton paradigm in magnetron sputtering". United States. https://doi.org/10.1063/1.4904713.
@article{osti_1226614,
title = {Localized heating of electrons in ionization zones: Going beyond the Penning-Thornton paradigm in magnetron sputtering},
author = {Anders, André},
abstractNote = {},
doi = {10.1063/1.4904713},
journal = {Applied Physics Letters},
number = 24,
volume = 105,
place = {United States},
year = {Tue Dec 16 00:00:00 EST 2014},
month = {Tue Dec 16 00:00:00 EST 2014}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
https://doi.org/10.1063/1.4904713

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Cited by: 47 works
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Works referenced in this record:

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