Localized heating of electrons in ionization zones: Going beyond the Penning-Thornton paradigm in magnetron sputtering
- Authors:
-
- Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
- Publication Date:
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1226614
- Grant/Contract Number:
- AC02-05CH11231
- Resource Type:
- Publisher's Accepted Manuscript
- Journal Name:
- Applied Physics Letters
- Additional Journal Information:
- Journal Name: Applied Physics Letters Journal Volume: 105 Journal Issue: 24; Journal ID: ISSN 0003-6951
- Publisher:
- American Institute of Physics
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Anders, André. Localized heating of electrons in ionization zones: Going beyond the Penning-Thornton paradigm in magnetron sputtering. United States: N. p., 2014.
Web. doi:10.1063/1.4904713.
Anders, André. Localized heating of electrons in ionization zones: Going beyond the Penning-Thornton paradigm in magnetron sputtering. United States. https://doi.org/10.1063/1.4904713
Anders, André. Tue .
"Localized heating of electrons in ionization zones: Going beyond the Penning-Thornton paradigm in magnetron sputtering". United States. https://doi.org/10.1063/1.4904713.
@article{osti_1226614,
title = {Localized heating of electrons in ionization zones: Going beyond the Penning-Thornton paradigm in magnetron sputtering},
author = {Anders, André},
abstractNote = {},
doi = {10.1063/1.4904713},
journal = {Applied Physics Letters},
number = 24,
volume = 105,
place = {United States},
year = {Tue Dec 16 00:00:00 EST 2014},
month = {Tue Dec 16 00:00:00 EST 2014}
}
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https://doi.org/10.1063/1.4904713
https://doi.org/10.1063/1.4904713
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Cited by: 47 works
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