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Title: Electron heating in low pressure capacitive discharges revisited

Authors:
; ;
Publication Date:
Grant/Contract Number:
SC0001939
Type:
Publisher's Accepted Manuscript
Journal Name:
Physics of Plasmas
Additional Journal Information:
Journal Volume: 21; Journal Issue: 12; Related Information: CHORUS Timestamp: 2016-12-26 00:13:50; Journal ID: ISSN 1070-664X
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1226585