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Title: High-resolution subsurface microscopy of CMOS integrated circuits using radially polarized light

Authors:
; ; ; ; ; ;
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1226398
Grant/Contract Number:  
NA0001944
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Optics Letters
Additional Journal Information:
Journal Volume: 40; Journal Issue: 23; Journal ID: ISSN 0146-9592
Publisher:
Optical Society of America
Country of Publication:
United States
Language:
English

Citation Formats

Rutkauskas, M., Farrell, C., Dorrer, C., Marshall, K. L., Lundquist, T. R., Vedagarbha, P., and Reid, D. T. High-resolution subsurface microscopy of CMOS integrated circuits using radially polarized light. United States: N. p., 2015. Web. doi:10.1364/OL.40.005502.
Rutkauskas, M., Farrell, C., Dorrer, C., Marshall, K. L., Lundquist, T. R., Vedagarbha, P., & Reid, D. T. High-resolution subsurface microscopy of CMOS integrated circuits using radially polarized light. United States. doi:10.1364/OL.40.005502.
Rutkauskas, M., Farrell, C., Dorrer, C., Marshall, K. L., Lundquist, T. R., Vedagarbha, P., and Reid, D. T. Thu . "High-resolution subsurface microscopy of CMOS integrated circuits using radially polarized light". United States. doi:10.1364/OL.40.005502.
@article{osti_1226398,
title = {High-resolution subsurface microscopy of CMOS integrated circuits using radially polarized light},
author = {Rutkauskas, M. and Farrell, C. and Dorrer, C. and Marshall, K. L. and Lundquist, T. R. and Vedagarbha, P. and Reid, D. T.},
abstractNote = {},
doi = {10.1364/OL.40.005502},
journal = {Optics Letters},
number = 23,
volume = 40,
place = {United States},
year = {2015},
month = {11}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI: 10.1364/OL.40.005502

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