Epitaxial growth of high quality WO3 thin films

Leng, X.; Pereiro, J.; Strle, J.; Bollinger, A. T.; Bozovic, I.

doi:10.1063/1.4930214

Title: Epitaxial growth of high quality WO₃ thin films

Journal Article · 08 September 2015 · APL Materials

DOI: https://doi.org/10.1063/1.4930214 · OSTI ID:1226040

Leng, X. ^[1]; Pereiro, J. ^[1]; Strle, J. ^[2]; Bollinger, A. T. ^[1]; Bozovic, I. ^[3]

Brookhaven National Lab. (BNL), Upton, NY (United States)
Brookhaven National Lab. (BNL), Upton, NY (United States); Jožef Stefan Institute, Ljubljana (Slovenia)
Brookhaven National Lab. (BNL), Upton, NY (United States); Yale Univ., New Haven, CT (United States)

We have grown epitaxial WO₃ films on various single-crystal substrates using radio-frequency (RF) magnetron sputtering. While pronounced surface roughness is observed in films grown on LaSrAlO₄ substrates, films grown on YAlO₃ substrates show atomically flat surfaces, as demonstrated by atomic force microscopy (AFM) and X-ray diffraction (XRD) measurements. The crystalline structure has been confirmed to be monoclinic by symmetric and skew-symmetric XRD. Furthermore, the dependence of the growth modes and the surface morphology on the lattice mismatch is discussed.

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Research Organization:: Brookhaven National Laboratory (BNL), Upton, NY (United States); Energy Frontier Research Centers (EFRC) (United States). Center for Emergent Superconductivity (CES)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)

OSTI ID:: 1226040

Report Number(s):: BNL-108357-2015-JA; KC0203020

Journal Information:: APL Materials, Journal Name: APL Materials Vol. 3; ISSN 2166-532X

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

References (33)

Synthesis and Characterization of Chromium-Doped Mesoporous Tungsten Oxide for Gas Sensing Applications Rossinyol, E.; Prim, A.; Pellicer, E. Advanced Functional Materials, Vol. 17, Issue 11 https://doi.org/10.1002/adfm.200600722	journal	July 2007
Conductive polymer/high-temperature superconductor composite structures Haupt, Steven G.; Riley, David R.; McDevitt, John T. Advanced Materials, Vol. 5, Issue 10 https://doi.org/10.1002/adma.19930051017	journal	October 1993
Highly Crystalline WO ₃ Thin Films with Ordered 3D Mesoporosity and Improved Electrochromic Performance Brezesinski, Torsten; Fattakhova Rohlfing, Dina; Sallard, Sébastien Small, Vol. 2, Issue 10 https://doi.org/10.1002/smll.200600176	journal	August 2006
Ferroelectric Tungsten Trioxide Woodward, P. M.; Sleight, A. W.; Vogt, T. Journal of Solid State Chemistry, Vol. 131, Issue 1 https://doi.org/10.1006/jssc.1997.7268	journal	June 1997
Interfacial lattice mismatch effects in III–V compounds Olsen, G. H. Journal of Crystal Growth, Vol. 31 https://doi.org/10.1016/0022-0248(75)90135-9	journal	December 1975
Epitaxial growth of WO3 thin films on MgO and Al2O3 Kobayashi, Y.; Terada, S.; Kubota, K. Thin Solid Films, Vol. 168, Issue 1 https://doi.org/10.1016/0040-6090(89)90696-2	journal	January 1989
Effect of heat treatment on the structure, composition and electrochromic properties of evaporated tungsten oxide films: I Agrawal, A.; Habibi, H. Thin Solid Films, Vol. 169, Issue 2 https://doi.org/10.1016/0040-6090(89)90709-8	journal	February 1989
WO3 sputtered thin films for NOx monitoring Sberveglieri, G.; Depero, L.; Groppelli, S. Sensors and Actuators B: Chemical, Vol. 26, Issue 1-3 https://doi.org/10.1016/0925-4005(94)01563-W	journal	January 1995
NO2 sensitivity of WO3 thin film obtained by high vacuum thermal evaporation Cantalini, C.; Sun, H. T.; Faccio, M. Sensors and Actuators B: Chemical, Vol. 31, Issue 1-2 https://doi.org/10.1016/0925-4005(96)80020-7	journal	February 1996
Minimum energy configuration of epitaxial material clusters on a lattice-mismatched substrate Kukta, R. V.; Freund, L. B. Journal of the Mechanics and Physics of Solids, Vol. 45, Issue 11-12 https://doi.org/10.1016/S0022-5096(97)00031-8	journal	November 1997
Chemical vapour deposition of epitaxial WO3 films Tägtström, P.; Jansson, U. Thin Solid Films, Vol. 352, Issue 1-2 https://doi.org/10.1016/S0040-6090(99)00379-X	journal	September 1999
Electrochromic materials and devices: present and future Somani, Prakash R.; Radhakrishnan, S. Materials Chemistry and Physics, Vol. 77, Issue 1 https://doi.org/10.1016/S0254-0584(01)00575-2	journal	January 2003
Structural and gasochromic properties of epitaxial WO3 films prepared by pulsed laser deposition Yamamoto, S.; Inouye, A.; Yoshikawa, M. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 266, Issue 5 https://doi.org/10.1016/j.nimb.2007.12.092	journal	March 2008
Surface phase transitions upon reduction of epitaxial WO3(100) thin films Li, M.; Altman, E. I.; Posadas, A. Thin Solid Films, Vol. 446, Issue 2 https://doi.org/10.1016/j.tsf.2003.10.002	journal	January 2004
Structural Stability and Phase Transitions in WO ₃ Thin Films Ramana, C. V.; Utsunomiya, S.; Ewing, R. C. The Journal of Physical Chemistry B, Vol. 110, Issue 21 https://doi.org/10.1021/jp056664i	journal	June 2006
WO3 thin film prepared by PECVD technique and its gas sensing properties to NO2 Tong, Maosong; Dai, Guorui; Wu, Yuanda Journal of Materials Science, Vol. 36, Issue 10, p. 2535-2538 https://doi.org/10.1023/A:1017950619864	journal	January 2001
Superconductor–insulator transition in La2 − xSr x CuO4 at the pair quantum resistance Bollinger, A. T.; Dubuis, G.; Yoon, J. Nature, Vol. 472, Issue 7344 https://doi.org/10.1038/nature09998	journal	April 2011
Electric-field-induced superconductivity in an insulator Ueno, K.; Nakamura, S.; Shimotani, H. Nature Materials, Vol. 7, Issue 11, p. 855-858 https://doi.org/10.1038/nmat2298	journal	October 2008
Liquid-gated interface superconductivity on an atomically flat film Ye, J. T.; Inoue, S.; Kobayashi, K. Nature Materials, Vol. 9, Issue 2 https://doi.org/10.1038/nmat2587	journal	November 2009
Physical and electrochemichromic properties of rf sputtered tungsten oxide films Kaneko, H.; Nishimoto, S.; Miyake, K. Journal of Applied Physics, Vol. 59, Issue 7 https://doi.org/10.1063/1.337001	journal	April 1986
Preparation and aging of sputtered tungstic oxide films Akram, Hossain; Tatsuoka, Hirokazu; Kitao, Michihiko Journal of Applied Physics, Vol. 62, Issue 5 https://doi.org/10.1063/1.339547	journal	September 1987
Crosshatched surface morphology in strained III‐V semiconductor films Chang, Kevin H.; Gilbala, Ronald; Srolovitz, David J. Journal of Applied Physics, Vol. 67, Issue 9 https://doi.org/10.1063/1.344968	journal	May 1990
Gas-sensing properties of sputtered thin films of tungsten oxide Giulio, M. Di; Manno, D.; Micocci, G. Journal of Physics D: Applied Physics, Vol. 30, Issue 23 https://doi.org/10.1088/0022-3727/30/23/005	journal	December 1997
Epitaxial growth of WO ₃ films on SrTiO ₃ and sapphire Garg, A.; Leake, J. A.; Barber, Z. H. Journal of Physics D: Applied Physics, Vol. 33, Issue 9 https://doi.org/10.1088/0022-3727/33/9/303	journal	April 2000
Sheet superconductivity in : crystal structure of the tetragonal matrix Aird, A.; Domeneghetti, M. C.; Mazzi, F. Journal of Physics: Condensed Matter, Vol. 10, Issue 33 https://doi.org/10.1088/0953-8984/10/33/002	journal	August 1998
High-temperature phase transitions in tungsten trioxide - the last word? Howard, Christopher J.; Luca, Vittorio; Knight, Kevin S. Journal of Physics: Condensed Matter, Vol. 14, Issue 3 https://doi.org/10.1088/0953-8984/14/3/308	journal	December 2001
Electrostatic Control of the Evolution from a Superconducting Phase to an Insulating Phase in Ultrathin YBa 2 Cu 3 O 7 − x Films Leng, Xiang; Garcia-Barriocanal, Javier; Bose, Shameek Physical Review Letters, Vol. 107, Issue 2 https://doi.org/10.1103/PhysRevLett.107.027001	journal	July 2011
Dislocation-free Stranski-Krastanow growth of Ge on Si(100) Eaglesham, D. J.; Cerullo, M. Physical Review Letters, Vol. 64, Issue 16 https://doi.org/10.1103/PhysRevLett.64.1943	journal	April 1990
Semiconductor Surface Roughness: Dependence on Sign and Magnitude of Bulk Strain Xie, Y. H.; Gilmer, G. H.; Roland, C. Physical Review Letters, Vol. 73, Issue 22 https://doi.org/10.1103/PhysRevLett.73.3006	journal	November 1994
Controlled growth of WO3 films LeGore, L. J.; Greenwood, O. D.; Paulus, J. W. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 15, Issue 3 https://doi.org/10.1116/1.580599	journal	May 1997
Organic conductor/high-T c superconductor bilayer structures Clevenger, Marvin B.; Jones, Christopher E.; Haupt, Steven G. Photonics West '96, SPIE Proceedings https://doi.org/10.1117/12.250265	conference	July 1996
Electrochromic Materials Mortimer, Roger J. Annual Review of Materials Research, Vol. 41, Issue 1 https://doi.org/10.1146/annurev-matsci-062910-100344	journal	August 2011
Electrochromic Devices Based on Porous Tungsten Oxide Thin Films Djaoued, Y.; Balaji, S.; Brüning, R. Journal of Nanomaterials, Vol. 2012 https://doi.org/10.1155/2012/674168	journal	January 2012

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Title: Epitaxial growth of high quality WO₃ thin films