Diamond synthesis at atmospheric pressure by microwave capillary plasma chemical vapor deposition

Gou, Huiyang; Hemley, Russell J.; Hemawan, Kadek W.

doi:10.1063/1.4934751

Title: Diamond synthesis at atmospheric pressure by microwave capillary plasma chemical vapor deposition

Abstract

Polycrystalline diamond has been successfully synthesized on silicon substrates at atmospheric pressure using a microwave capillary plasma chemical vapor deposition technique. The CH₄/Ar plasma was generated inside of quartz capillary tubes using 2.45 GHz microwave excitation without adding H2 into the deposition gas chemistry. Electronically excited species of CN, C₂, Ar, N₂, CH, H_β and H_α were observed in emission spectra. Raman measurements of deposited material indicate the formation of well-crystallized diamond, as evidenced by the sharp T_2g phonon at 1333 cm^-1 peak relative to the Raman features of graphitic carbon. Furthermore, field emission scanning electron microscopy (SEM) images reveal that, depending on the on growth conditions, the carbon microstructures of grown films exhibit “coral” and “cauliflower-like” morphologies or well-facetted diamond crystals with grain sizes ranging from 100 nm to 10 μm.

Authors:

^[1]; Hemley, Russell J. ^[1];

^[1]

Carnegie Inst. of Washington, Washington, D.C. (United States)

Publication Date:: Mon Nov 02 00:00:00 EST 2015

Research Org.:: Carnegie Inst. of Washington, Washington, DC (United States); Energy Frontier Research Centers (EFRC) (United States). Energy Frontier Research in Extreme Environments (EFree)

Sponsoring Org.:: USDOE National Nuclear Security Administration (NNSA)

OSTI Identifier:: 1335449

Alternate Identifier(s):: OSTI ID: 1224932

Grant/Contract Number:: NA0002006; SC0001057; W31P4Q1310005; NA-002006

Resource Type:: Accepted Manuscript

Journal Name:: Applied Physics Letters

Additional Journal Information:: Journal Volume: 107; Journal Issue: 18; Journal ID: ISSN 0003-6951

Publisher:: American Institute of Physics (AIP)

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; Methane; diamond; atmospheric pressure

Citation Formats


                    Gou, Huiyang, Hemley, Russell J., and Hemawan, Kadek W. Diamond synthesis at atmospheric pressure by microwave capillary plasma chemical vapor deposition.  United States: N. p., 2015. 
Web.  doi:10.1063/1.4934751.

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                    Gou, Huiyang, Hemley, Russell J., & Hemawan, Kadek W. Diamond synthesis at atmospheric pressure by microwave capillary plasma chemical vapor deposition.  United States.  https://doi.org/10.1063/1.4934751

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                    Gou, Huiyang, Hemley, Russell J., and Hemawan, Kadek W. Mon .  
"Diamond synthesis at atmospheric pressure by microwave capillary plasma chemical vapor deposition".  United States.  https://doi.org/10.1063/1.4934751.  https://www.osti.gov/servlets/purl/1335449.

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@article{osti_1335449,

  title        = {Diamond synthesis at atmospheric pressure by microwave capillary plasma chemical vapor deposition},

  author       = {Gou, Huiyang and Hemley, Russell J. and Hemawan, Kadek W.},

  abstractNote = {Polycrystalline diamond has been successfully synthesized on silicon substrates at atmospheric pressure using a microwave capillary plasma chemical vapor deposition technique. The CH4/Ar plasma was generated inside of quartz capillary tubes using 2.45 GHz microwave excitation without adding H2 into the deposition gas chemistry. Electronically excited species of CN, C2, Ar, N2, CH, Hβ and Hα were observed in emission spectra. Raman measurements of deposited material indicate the formation of well-crystallized diamond, as evidenced by the sharp T2g phonon at 1333 cm-1 peak relative to the Raman features of graphitic carbon. Furthermore, field emission scanning electron microscopy (SEM) images reveal that, depending on the on growth conditions, the carbon microstructures of grown films exhibit “coral” and “cauliflower-like” morphologies or well-facetted diamond crystals with grain sizes ranging from 100 nm to 10 μm.},

  doi          = {10.1063/1.4934751},

  journal      = {Applied Physics Letters},

  number       = 18,

  volume       = 107,

  place        = {United States},

  year         = {Mon Nov 02 00:00:00 EST 2015},

  month        = {Mon Nov 02 00:00:00 EST 2015}

}

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Works referencing / citing this record:

Fast growth of nanodiamond in a microwave oven under atmospheric conditions
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Title: Diamond synthesis at atmospheric pressure by microwave capillary plasma chemical vapor deposition

Abstract

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Uniform deposition of diamond films using a flat flame stabilized in the stagnation‐point flow
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Amorphous carbon film deposition on the inner surface of tubes using atmospheric pressure pulsed filamentary plasma source
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