skip to main content

DOE PAGESDOE PAGES

Title: Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon

In this study, thin films of lithium niobate are wafer bonded onto silicon substrates and rib-loaded with a chalcogenide glass, Ge 23Sb 7S 70, to demonstrate strongly confined single-mode submicron waveguides, microring modulators, and Mach-Zehnder modulators in the telecom C band. The 200 μm radii microring modulators present 1.2 dB/cm waveguide propagation loss, 1.2 × 10 5 quality factor, 0.4 GHz/V tuning rate, and 13 dB extinction ratio. The 6 mm long Mach-Zehnder modulators have a half-wave voltage-length product of 3.8 V.cm and an extinction ratio of 15 dB. The demonstrated work is a key step towards enabling wafer scale dense on-chip integration of high performance lithium niobate electro-optical devices on silicon for short reach optical interconnects and higher order advanced modulation schemes.
Authors:
 [1] ;  [2] ;  [1] ;  [1] ;  [3] ;  [3] ;  [2] ;  [1]
  1. Univ. of Central Florida, Orlando, FL (United States)
  2. Partow Technologies LLC, Orlando, FL (United States)
  3. Univ. of Central Florida, Orlando, FL (United States); Clemson Univ., Clemson, SC (United States)
Publication Date:
Grant/Contract Number:
SC0013245
Type:
Accepted Manuscript
Journal Name:
Optics Express
Additional Journal Information:
Journal Volume: 23; Journal Issue: 17; Journal ID: ISSN 1094-4087
Publisher:
Optical Society of America (OSA)
Research Org:
Partow Technologies LLC, Orlando, FL (United States)
Sponsoring Org:
USDOE Office of Science (SC)
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; integrated optics; modulators; lithium niobate; optoelectronics; integrated optoelectronic circuits
OSTI Identifier:
1224859

Rao, Ashutosh, Patil, Aniket, Chiles, Jeff, Malinowski, Marcin, Novak, Spencer, Richardson, Kathleen, Rabiei, Payam, and Fathpour, Sasan. Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon. United States: N. p., Web. doi:10.1364/OE.23.022746.
Rao, Ashutosh, Patil, Aniket, Chiles, Jeff, Malinowski, Marcin, Novak, Spencer, Richardson, Kathleen, Rabiei, Payam, & Fathpour, Sasan. Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon. United States. doi:10.1364/OE.23.022746.
Rao, Ashutosh, Patil, Aniket, Chiles, Jeff, Malinowski, Marcin, Novak, Spencer, Richardson, Kathleen, Rabiei, Payam, and Fathpour, Sasan. 2015. "Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon". United States. doi:10.1364/OE.23.022746. https://www.osti.gov/servlets/purl/1224859.
@article{osti_1224859,
title = {Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon},
author = {Rao, Ashutosh and Patil, Aniket and Chiles, Jeff and Malinowski, Marcin and Novak, Spencer and Richardson, Kathleen and Rabiei, Payam and Fathpour, Sasan},
abstractNote = {In this study, thin films of lithium niobate are wafer bonded onto silicon substrates and rib-loaded with a chalcogenide glass, Ge23Sb7S70, to demonstrate strongly confined single-mode submicron waveguides, microring modulators, and Mach-Zehnder modulators in the telecom C band. The 200 μm radii microring modulators present 1.2 dB/cm waveguide propagation loss, 1.2 × 105 quality factor, 0.4 GHz/V tuning rate, and 13 dB extinction ratio. The 6 mm long Mach-Zehnder modulators have a half-wave voltage-length product of 3.8 V.cm and an extinction ratio of 15 dB. The demonstrated work is a key step towards enabling wafer scale dense on-chip integration of high performance lithium niobate electro-optical devices on silicon for short reach optical interconnects and higher order advanced modulation schemes.},
doi = {10.1364/OE.23.022746},
journal = {Optics Express},
number = 17,
volume = 23,
place = {United States},
year = {2015},
month = {8}
}