Femtosecond laser ablation-based mass spectrometry. An ideal tool for stoichiometric analysis of thin films
Abstract
An accurate and routinely available method for stoichiometric analysis of thin films is a desideratum of modern materials science where a material’s properties depend sensitively on elemental composition. We thoroughly investigated femtosecond laser ablation-inductively coupled plasma-mass spectrometry (fs-LA-ICP-MS) as an analytical technique for determination of the stoichiometry of thin films down to the nanometer scale. The use of femtosecond laser ablation allows for precise removal of material with high spatial and depth resolution that can be coupled to an ICP-MS to obtain elemental and isotopic information. We used molecular beam epitaxy-grown thin films of LaPd(x)Sb2 and T´-La2CuO4 to demonstrate the capacity of fs-LA-ICP-MS for stoichiometric analysis and the spatial and depth resolution of the technique. Here we demonstrate that the stoichiometric information of thin films with a thickness of ~10 nm or lower can be determined. Furthermore, our results indicate that fs-LA-ICP-MS provides precise information on the thin film-substrate interface and is able to detect the interdiffusion of cations.
- Authors:
-
- Pacific Northwest National Lab. (PNNL), Richland, WA (United States); Purdue University, West Lafayette, IN (United States). School of Nuclear Engineering.
- Technische Universität Darmstadt, Darmstadt (Germany). Institute for Materials Science.
- Purdue University, West Lafayette, IN (United States). School of Nuclear Engineering.
- Pacific Northwest National Lab. (PNNL), Richland, WA (United States)
- Publication Date:
- Research Org.:
- Pacific Northwest National Laboratory (PNNL), Richland, WA (United States)
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA) Office of Nonproliferation and Verification Research and Development (NA-22); USDOE Laboratory Directed Research and Development (LDRD) Program; National Science Foundation (NSF)
- OSTI Identifier:
- 1212861
- Report Number(s):
- PNNL-SA-107263
Journal ID: ISSN 2045-2322; srep13121
- Grant/Contract Number:
- AC05-76RL01830
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Scientific Reports
- Additional Journal Information:
- Journal Volume: 5; Journal ID: ISSN 2045-2322
- Publisher:
- Nature Publishing Group
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; mass spectrometry; nanoscale materials
Citation Formats
LaHaye, Nicole L., Kurian, Jose, Diwakar, Prasoon K., Alff, Lambert, and Harilal, Sivanandan S. Femtosecond laser ablation-based mass spectrometry. An ideal tool for stoichiometric analysis of thin films. United States: N. p., 2015.
Web. doi:10.1038/srep13121.
LaHaye, Nicole L., Kurian, Jose, Diwakar, Prasoon K., Alff, Lambert, & Harilal, Sivanandan S. Femtosecond laser ablation-based mass spectrometry. An ideal tool for stoichiometric analysis of thin films. United States. https://doi.org/10.1038/srep13121
LaHaye, Nicole L., Kurian, Jose, Diwakar, Prasoon K., Alff, Lambert, and Harilal, Sivanandan S. Wed .
"Femtosecond laser ablation-based mass spectrometry. An ideal tool for stoichiometric analysis of thin films". United States. https://doi.org/10.1038/srep13121. https://www.osti.gov/servlets/purl/1212861.
@article{osti_1212861,
title = {Femtosecond laser ablation-based mass spectrometry. An ideal tool for stoichiometric analysis of thin films},
author = {LaHaye, Nicole L. and Kurian, Jose and Diwakar, Prasoon K. and Alff, Lambert and Harilal, Sivanandan S.},
abstractNote = {An accurate and routinely available method for stoichiometric analysis of thin films is a desideratum of modern materials science where a material’s properties depend sensitively on elemental composition. We thoroughly investigated femtosecond laser ablation-inductively coupled plasma-mass spectrometry (fs-LA-ICP-MS) as an analytical technique for determination of the stoichiometry of thin films down to the nanometer scale. The use of femtosecond laser ablation allows for precise removal of material with high spatial and depth resolution that can be coupled to an ICP-MS to obtain elemental and isotopic information. We used molecular beam epitaxy-grown thin films of LaPd(x)Sb2 and T´-La2CuO4 to demonstrate the capacity of fs-LA-ICP-MS for stoichiometric analysis and the spatial and depth resolution of the technique. Here we demonstrate that the stoichiometric information of thin films with a thickness of ~10 nm or lower can be determined. Furthermore, our results indicate that fs-LA-ICP-MS provides precise information on the thin film-substrate interface and is able to detect the interdiffusion of cations.},
doi = {10.1038/srep13121},
journal = {Scientific Reports},
number = ,
volume = 5,
place = {United States},
year = {Wed Aug 19 00:00:00 EDT 2015},
month = {Wed Aug 19 00:00:00 EDT 2015}
}
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Crystalline Oxides on Silicon
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Electron-doped infinite-layer thin films with TC over 40 K grown on DyScO3 substrates
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Thin-film cliffhanger
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Dimensionality Control of Electronic Phase Transitions in Nickel-Oxide Superlattices
journal, May 2011
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Materials chemistry and thermodynamics of REBa2Cu3O7?x
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Thin films of hard cubic Zr3N4 stabilized by stress
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Dielectric properties in heteroepitaxial Ba0.6Sr0.4TiO3 thin films: Effect of internal stresses and dislocation-type defects
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Films
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Subsecond melt processing for achieving SiGe layers
journal, September 2010
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Microscopic processes in dielectrics under irradiation by subpicosecond laser pulses
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Near Infra Red femtosecond Laser Ablation: the influence of energy and pulse width on the LA-ICP-MS analysis of monazite
journal, January 2010
- d'Abzac, François-Xavier; Poitrasson, Franck; Freydier, Rémi
- Journal of Analytical Atomic Spectrometry, Vol. 25, Issue 5
The effect of laser pulse duration on ICP-MS signal intensity, elemental fractionation, and detection limits in fs-LA-ICP-MS
journal, January 2013
- LaHaye, Nicole L.; Harilal, Sivanandan S.; Diwakar, Prasoon K.
- Journal of Analytical Atomic Spectrometry, Vol. 28, Issue 11
Femtosecond laser ablation: Experimental study of the repetition rate influence on inductively coupled plasma mass spectrometry performance
journal, February 2008
- Gonzalez, Jhanis J.; Fernandez, Alberto; Oropeza, Dayana
- Spectrochimica Acta Part B: Atomic Spectroscopy, Vol. 63, Issue 2
Phase control in La-214 epitaxial thin films
conference, November 2002
- Naito, Michio; Tsukada, Akio; Greibe, Tine
- International Symposium on Optical Science and Technology, SPIE Proceedings
Phase control of in thin film synthesis
journal, November 2002
- Tsukada, A.; Greibe, T.; Naito, M.
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New class of T′-structure cuprate superconductors
journal, February 2005
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- LaHaye, N. L.; Harilal, S. S.; Diwakar, P. K.
- Journal of Applied Physics, Vol. 114, Issue 2
Growth of superconducting epitaxial LaNixBi2pnictide thin films with a Bi square net layer by reactive molecular beam epitaxy
journal, November 2012
- Buckow, A.; Retzlaff, R.; Kurian, J.
- Superconductor Science and Technology, Vol. 26, Issue 1