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Title: Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range

Abstract

Nanoradian Surface Profilers (NSPs) are required for state-of-the-art synchrotron radiation optics and high-precision optical measurements. Nano-radian accuracy must be maintained in the large-angle test range. However, the beams' notable lateral motions during tests of most operating profilers, combined with the insufficiencies of their optical components, generate significant errors of 1  μ rad rms in the measurements. The solution to nano-radian accuracy for the new generation of surface profilers in this range is to apply a scanning optical head, combined with nontilted reference beam. I describe here my comparison of different scan modes and discuss some test results.

Authors:
 [1]
  1. Instrumentation Division, Brookhaven National Laboratory, Upton, NY 11973, USA
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1198047
Grant/Contract Number:  
AC02-98CH10886
Resource Type:
Published Article
Journal Name:
International Journal of Optics
Additional Journal Information:
Journal Name: International Journal of Optics Journal Volume: 2011; Journal ID: ISSN 1687-9384
Publisher:
Hindawi Publishing Corporation
Country of Publication:
Country unknown/Code not available
Language:
English

Citation Formats

Qian, Shinan. Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range. Country unknown/Code not available: N. p., 2011. Web. doi:10.1155/2011/902158.
Qian, Shinan. Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range. Country unknown/Code not available. doi:10.1155/2011/902158.
Qian, Shinan. Sat . "Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range". Country unknown/Code not available. doi:10.1155/2011/902158.
@article{osti_1198047,
title = {Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range},
author = {Qian, Shinan},
abstractNote = {Nanoradian Surface Profilers (NSPs) are required for state-of-the-art synchrotron radiation optics and high-precision optical measurements. Nano-radian accuracy must be maintained in the large-angle test range. However, the beams' notable lateral motions during tests of most operating profilers, combined with the insufficiencies of their optical components, generate significant errors of ∼ 1  μ rad rms in the measurements. The solution to nano-radian accuracy for the new generation of surface profilers in this range is to apply a scanning optical head, combined with nontilted reference beam. I describe here my comparison of different scan modes and discuss some test results.},
doi = {10.1155/2011/902158},
journal = {International Journal of Optics},
number = ,
volume = 2011,
place = {Country unknown/Code not available},
year = {2011},
month = {1}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI: 10.1155/2011/902158

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