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Title: Plastic deformation in profile-coated elliptical KB mirrors

Abstract

Profile coating has been successfully applied to produce elliptical Kirkpatrick-Baez (KB) mirrors using both cylindrical and flat Si substrates. Previously, focusing widths of 70 nm with 15-keV monochromatic and 80 nm with white beam were achieved using a flat Si substrate. Now, precision elliptical KB mirrors with sub-nm figure errors are produced with both Au and Pt coatings on flat substrates. Here, recent studies of bare Si-, Au-, and Pt-coated KB mirrors under prolonged synchrotron X-ray radiation and low-temperature vacuum annealing will be discussed in terms of film stress relaxation and Si plastic deformation.

Authors:
 [1];  [2];  [1];  [3];  [1];  [1];  [1];  [4];  [1]
  1. Argonne National Lab. (ANL), Argonne, IL (United States). X-ray Science Div.
  2. National Synchrotron Light Source II, Brookhaven National Laboratory (BNL), Upton, NY (United States)
  3. Synchrotron Soleil, BP Gif-sur-Yvette (France)
  4. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Materials Science and Technology Div.
Publication Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
1197880
Alternate Identifier(s):
OSTI ID: 1052266
Grant/Contract Number:  
AC05-00OR22725; AC02-06CH11357
Resource Type:
Published Article
Journal Name:
ISRN Optics
Additional Journal Information:
Journal Volume: 2012; Journal ID: ISSN 2090-7826
Publisher:
Hindawi
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Liu, Chian, Conley, R., Qian, J., Kewish, C. M., Liu, W., Assoufid, L., Macrander, A. T., Ice, G. E., and Tischler, J. Z. Plastic deformation in profile-coated elliptical KB mirrors. United States: N. p., 2012. Web. doi:10.5402/2012/151092.
Liu, Chian, Conley, R., Qian, J., Kewish, C. M., Liu, W., Assoufid, L., Macrander, A. T., Ice, G. E., & Tischler, J. Z. Plastic deformation in profile-coated elliptical KB mirrors. United States. doi:10.5402/2012/151092.
Liu, Chian, Conley, R., Qian, J., Kewish, C. M., Liu, W., Assoufid, L., Macrander, A. T., Ice, G. E., and Tischler, J. Z. Sun . "Plastic deformation in profile-coated elliptical KB mirrors". United States. doi:10.5402/2012/151092.
@article{osti_1197880,
title = {Plastic deformation in profile-coated elliptical KB mirrors},
author = {Liu, Chian and Conley, R. and Qian, J. and Kewish, C. M. and Liu, W. and Assoufid, L. and Macrander, A. T. and Ice, G. E. and Tischler, J. Z.},
abstractNote = {Profile coating has been successfully applied to produce elliptical Kirkpatrick-Baez (KB) mirrors using both cylindrical and flat Si substrates. Previously, focusing widths of 70 nm with 15-keV monochromatic and 80 nm with white beam were achieved using a flat Si substrate. Now, precision elliptical KB mirrors with sub-nm figure errors are produced with both Au and Pt coatings on flat substrates. Here, recent studies of bare Si-, Au-, and Pt-coated KB mirrors under prolonged synchrotron X-ray radiation and low-temperature vacuum annealing will be discussed in terms of film stress relaxation and Si plastic deformation.},
doi = {10.5402/2012/151092},
journal = {ISRN Optics},
number = ,
volume = 2012,
place = {United States},
year = {2012},
month = {1}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI: 10.5402/2012/151092

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