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Title: Plastic deformation in profile-coated elliptical KB mirrors

Profile coating has been successfully applied to produce elliptical Kirkpatrick-Baez (KB) mirrors using both cylindrical and flat Si substrates. Previously, focusing widths of 70 nm with 15-keV monochromatic and 80 nm with white beam were achieved using a flat Si substrate. Now, precision elliptical KB mirrors with sub-nm figure errors are produced with both Au and Pt coatings on flat substrates. Here, recent studies of bare Si-, Au-, and Pt-coated KB mirrors under prolonged synchrotron X-ray radiation and low-temperature vacuum annealing will be discussed in terms of film stress relaxation and Si plastic deformation.
Authors:
 [1] ;  [2] ;  [1] ;  [3] ;  [1] ;  [1] ;  [1] ;  [4] ;  [1]
  1. Argonne National Lab. (ANL), Argonne, IL (United States). X-ray Science Div.
  2. National Synchrotron Light Source II, Brookhaven National Laboratory (BNL), Upton, NY (United States)
  3. Synchrotron Soleil, BP Gif-sur-Yvette (France)
  4. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Materials Science and Technology Div.
Publication Date:
Grant/Contract Number:
AC05-00OR22725; AC02-06CH11357
Type:
Published Article
Journal Name:
ISRN Optics
Additional Journal Information:
Journal Volume: 2012; Journal ID: ISSN 2090-7826
Publisher:
Hindawi
Research Org:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org:
USDOE Office of Science (SC)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE
OSTI Identifier:
1197880
Alternate Identifier(s):
OSTI ID: 1052266