Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition
Abstract
In this paper, platinum–carbon nanostructures deposited via electron beam induced deposition from MeCpPt(IV)Me3 are purified during a post-deposition electron exposure treatment in a localized oxygen ambient at room temperature. Time-dependent studies demonstrate that the process occurs from the top–down. Electron beam energy and current studies demonstrate that the process is controlled by a confluence of the electron energy loss and oxygen concentration. Furthermore, the experimental results are modeled as a 2nd order reaction which is dependent on both the electron energy loss density and the oxygen concentration. Finally, in addition to purification, the post-deposition electron stimulated oxygen purification process enhances the resolution of the EBID process due to the isotropic carbon removal from the as-deposited materials which produces high-fidelity shape retention.
- Authors:
-
- Univ. of Tennessee, Knoxville, TN (United States). Materials Science and Engineering Dept.
- Univ. of Tennessee, Knoxville, TN (United States). Materials Science and Engineering Dept.; Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Nanofabrication Research Lab., Center for Nanophase Materials Sciences
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Nanofabrication Research Lab., Center for Nanophase Materials Sciences
- Graz Univ. of Technology, Steyrergasse (Austria). Inst. for Electron Microscopy and Nanoanalysis
- Publication Date:
- Research Org.:
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS)
- Sponsoring Org.:
- USDOE Office of Science (SC)
- OSTI Identifier:
- 1185887
- Grant/Contract Number:
- AC05-00OR22725
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Beilstein Journal of Nanotechnology
- Additional Journal Information:
- Journal Volume: 6; Journal ID: ISSN 2190-4286
- Publisher:
- Beilstein Institute
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Lewis, Brett B., Stanford, Michael G., Fowlkes, Jason D., Lester, Kevin, Plank, Harald, and Rack, Philip D. Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition. United States: N. p., 2015.
Web. doi:10.3762/bjnano.6.94.
Lewis, Brett B., Stanford, Michael G., Fowlkes, Jason D., Lester, Kevin, Plank, Harald, & Rack, Philip D. Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition. United States. https://doi.org/10.3762/bjnano.6.94
Lewis, Brett B., Stanford, Michael G., Fowlkes, Jason D., Lester, Kevin, Plank, Harald, and Rack, Philip D. Wed .
"Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition". United States. https://doi.org/10.3762/bjnano.6.94. https://www.osti.gov/servlets/purl/1185887.
@article{osti_1185887,
title = {Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition},
author = {Lewis, Brett B. and Stanford, Michael G. and Fowlkes, Jason D. and Lester, Kevin and Plank, Harald and Rack, Philip D.},
abstractNote = {In this paper, platinum–carbon nanostructures deposited via electron beam induced deposition from MeCpPt(IV)Me3 are purified during a post-deposition electron exposure treatment in a localized oxygen ambient at room temperature. Time-dependent studies demonstrate that the process occurs from the top–down. Electron beam energy and current studies demonstrate that the process is controlled by a confluence of the electron energy loss and oxygen concentration. Furthermore, the experimental results are modeled as a 2nd order reaction which is dependent on both the electron energy loss density and the oxygen concentration. Finally, in addition to purification, the post-deposition electron stimulated oxygen purification process enhances the resolution of the EBID process due to the isotropic carbon removal from the as-deposited materials which produces high-fidelity shape retention.},
doi = {10.3762/bjnano.6.94},
journal = {Beilstein Journal of Nanotechnology},
number = ,
volume = 6,
place = {United States},
year = {Wed Apr 08 00:00:00 EDT 2015},
month = {Wed Apr 08 00:00:00 EDT 2015}
}
Web of Science
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