skip to main content


Title: Low-temperature plasma-deposited silicon epitaxial films: Growth and properties

Low-temperature (≤ 180 °C) epitaxial growth yields precise thickness, doping, and thermal-budget control, which enables advanced-design semiconductor devices. In this paper, we use plasma-ehanced chemical vapor deposition to grow homo-epitaxial layers and study the different growth modes on crystalline silicon substrates. In particular, we determine the conditions leading to epitaxial growth in light of a model that depends only on the silane concentration in the plasma and the mean free path length of surface adatoms. For such growth, we show that the presence of a persistent defective interface layer between the crystalline silicon substrate and the epitaxial layer stems not only from the growth conditions but also from unintentional contamination of the reactor. As a result of our findings, we determine the plasma conditions to grow high-quality bulk epitaxial films and propose a two-step growth process to obtain device-grade material.
 [1] ;  [1] ;  [1] ;  [1] ;  [2] ;  [2] ;  [1] ;  [1]
  1. École Polytechnique Fédérale de Lausanne, Neuchatel (Switzerland)
  2. École Polytechnique Fédérale de Lausanne, Lausanne (Switzerland)
Publication Date:
Grant/Contract Number:
Accepted Manuscript
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 116; Journal Issue: 5; Journal ID: ISSN 0021-8979
American Institute of Physics (AIP)
Research Org:
École Polytechnique Fédérale de Lausanne, Neuchatel (Switzerland)
Sponsoring Org:
USDOE Office of Energy Efficiency and Renewable Energy (EERE)
Country of Publication:
United States
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; crystalline silicon; homo-epitaxy; low temperature; PECVD
OSTI Identifier: