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Title: Spectroscopic analysis of Al and N diffusion in HfO 2

Authors:
; ; ; ; ;
Publication Date:
OSTI Identifier:
1074854
Grant/Contract Number:
AC02-98CH10886
Type:
Published Article
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 112; Journal Issue: 6; Related Information: CHORUS Timestamp: 2016-12-27 02:14:56; Journal ID: ISSN 0021-8979
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English