Document Details


PURL
Title:
WAFERING OF BULK SPECIMENS FOR TRANSMISSION ELECTRON MICROSCOPY
Author(s):
Subject Terms:
ELECTRON MICROSCOPY
Document Location:
DOE Public Reading Room - Hanford Battelle P.O. Box 999 MS H2-53 Richland WA 99352 (509)372-7443
Document Type:
REPORT
Publication Date:
1964 Feb 06
Declassification Status:
Declassified
Document Pages:
7
Accession Number:
RL-1-382335
Document Number(s):
HW-SA-3353
Originating Research Org.:
GE - HAPO
OpenNet Entry Date:
2004 Feb 24
OpenNet Modified Date:
2015 Aug 24
Description/Abstract:
DESCRIBES TECHNIQUE FOR PREPARING WAFERS WITH PLANE PARALLEL SIDES. PRESENTS EVIDENCE THAT THE WORKER LAYER INTRODUCED BY THE WAFERING ACTION IS REMOVED DURING SUBSEQUENT CHEM OF ELECTROLYTIC THINNING REQUIRED FOR TRANSMISSION ELECTRON MICROSCOPY


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