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Scroll vacuum pump

Abstract

An effort is made to apply a scroll machine to development of a vacuum pump. In view of mechanical simplification and load patterns, the vacuum pump uses a rotating mechanism to produce paired vortices rotating around each center. Chip seal and atmospheric pressure are utilized for axial gap sealing while a spring and atmospheric pressure for the radial gap sealing. In both gaps, the sealing direction is stationary relative to the environment during rotation, making it much easier to achieve effective sealing as compared to oscillating pumps. Since the compression ratio is high in vacuum pumps, a zero top clearance form is adopted for the central portion of vortices and an gas release valve is installed in the rotating axis. A compact Oldham coupling with a small inertia force is installed behind the vortices to maintain the required phase relations between the vortices. These improvements result in a vacuum of 1 Pa for dry operation and 10/sup -2/ Pa for oil flooded operation of a single-stage scroll machine at 1800 rpm. (5 figs, 1 tab, 4 refs)
Publication Date:
Feb 25, 1988
Product Type:
Journal Article
Reference Number:
NEDO-88-910308; EDB-88-132511
Resource Relation:
Journal Name: Nippon Kikai Gakkai Ronbunshu, B Hen; (Japan); Journal Volume: 54:498
Subject:
42 ENGINEERING; VACUUM PUMPS; CLEARANCE; COMPRESSION RATIO; SEALS; VORTICES; FLUIDIC DEVICES; HYDRODYNAMICS; VORTEX FLOW; EQUIPMENT; FLUID FLOW; FLUID MECHANICS; LABORATORY EQUIPMENT; MECHANICS; PUMPS; 420400* - Engineering- Heat Transfer & Fluid Flow
OSTI ID:
7199494
Research Organizations:
Mitsubishi Electric Corp., Central Research Lab., Osaka, Japan; Mitsubishi Electric Corp., Fukuoka Machinery Works, Fukuoka, Japan
Country of Origin:
Japan
Language:
Japanese
Other Identifying Numbers:
Journal ID: CODEN: NKGBD
Submitting Site:
NEDO
Size:
Pages: 410-413
Announcement Date:
Aug 01, 1988

Citation Formats

Morishita, Etsuo, Suganami, Takuya, Nishida, Mitsuhiro, Kitora, Yoshihisa, Yamamoto, Sakuei, and Fujii, Kosaburo. Scroll vacuum pump. Japan: N. p., 1988. Web.
Morishita, Etsuo, Suganami, Takuya, Nishida, Mitsuhiro, Kitora, Yoshihisa, Yamamoto, Sakuei, & Fujii, Kosaburo. Scroll vacuum pump. Japan.
Morishita, Etsuo, Suganami, Takuya, Nishida, Mitsuhiro, Kitora, Yoshihisa, Yamamoto, Sakuei, and Fujii, Kosaburo. 1988. "Scroll vacuum pump." Japan.
@misc{etde_7199494,
title = {Scroll vacuum pump}
author = {Morishita, Etsuo, Suganami, Takuya, Nishida, Mitsuhiro, Kitora, Yoshihisa, Yamamoto, Sakuei, and Fujii, Kosaburo}
abstractNote = {An effort is made to apply a scroll machine to development of a vacuum pump. In view of mechanical simplification and load patterns, the vacuum pump uses a rotating mechanism to produce paired vortices rotating around each center. Chip seal and atmospheric pressure are utilized for axial gap sealing while a spring and atmospheric pressure for the radial gap sealing. In both gaps, the sealing direction is stationary relative to the environment during rotation, making it much easier to achieve effective sealing as compared to oscillating pumps. Since the compression ratio is high in vacuum pumps, a zero top clearance form is adopted for the central portion of vortices and an gas release valve is installed in the rotating axis. A compact Oldham coupling with a small inertia force is installed behind the vortices to maintain the required phase relations between the vortices. These improvements result in a vacuum of 1 Pa for dry operation and 10/sup -2/ Pa for oil flooded operation of a single-stage scroll machine at 1800 rpm. (5 figs, 1 tab, 4 refs)}
journal = []
volume = {54:498}
journal type = {AC}
place = {Japan}
year = {1988}
month = {Feb}
}