The present invention relates to a charged particle beam detector which prevents transient phenomena disturbing the path and focusing of a charged particle beam travelling through a mounted axle. The present invention provides a charged particle beam detector capable of decreasing its reaction to the charge in energy of the charged particle beam even if the relative angle between the mounted axle and the scanner is unstable. The detector is characterized by mounting electrically conductive metal pieces of high melting point onto the face of a stepped, heat-resistant electric insulating material such that the pieces partially overlap each other and individually provide electric signals, whereby the detector is no longer affected by the beam. The thickness of the metal piece is selected so that an eddy current is not induced therein by an incident beam, thus the incident beam is not affected. The detector is capable of detecting a misaligned beam since the metal pieces partially overlap each other.