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Effects of ion beam bombardment of carbon thin films deposited onto tungsten carbide and tool steels

Abstract

A study was made of the effects of argon ion bombardment of carbon thin films deposited onto WC and tool steels. Carbon thin film deposition was performed at various temperatures ranging from 200degC to 350degC, using C{sub 6}H{sub 6} gas. Argon ion beam bombardment of the films was carried out at an energy of 150 keV with a dose of 1x10{sup 16} ions cm{sup -2}. The hardness and adhesion of the films were measured by means of Knoop hardness and scratch tests respectively. The structure of the carbon films was estimated by laser Raman spectroscopy, and the relations were investigated between the mechanical properties and the structure of the films. The hardness of carbon thin films increases as their deposition temperature decreases; this tendency corresponds to the increase in amorphous structure estimated by Raman spectra. Argon ion bombardment results in constant hardness and fraction of amorphous structure. Argon ion beam bombardment of films prior to additional carbon deposition may cause the adhesion of the subsequently deposited films to improve. It is concluded that argon ion beam bombardment is useful for improving the properties of carbon films deposited onto WC and tool steels. (orig.).
Authors:
Awazu, Kaoru; Yoshida, Hiroyuki; [1]  Watanabe, Hiroshi; [2]  Iwaki, Masaya; Guzman, L [3] 
  1. Industrial Research Inst. of Ishikawa (Japan)
  2. Gakushuin Univ., Tokyo (Japan)
  3. RIKEN, Saitama (Japan)
Publication Date:
Apr 15, 1992
Product Type:
Conference
Report Number:
CONF-910707-
Reference Number:
AIX-23-086054; EDB-92-179263
Resource Relation:
Journal Name: Surface and Coatings Technology; (Switzerland); Journal Volume: 51:1-3; Conference: 7. international conference on surface modification of metals by ion beams (SMMIB-7), Washington, DC (United States), 15-19 Jul 1991
Subject:
36 MATERIALS SCIENCE; CARBON; ION IMPLANTATION; THIN FILMS; ADHESION; AMORPHOUS STATE; ARGON IONS; BENZENE; CARBON STEELS; ION BEAMS; KEV RANGE 100-1000; KNOOP HARDNESS; MECHANICAL PROPERTIES; RADIATION DOSES; RAMAN SPECTRA; SCANNING ELECTRON MICROSCOPY; SPUTTERING; STEELS; TEMPERATURE DEPENDENCE; TEMPERATURE RANGE 0400-1000 K; TUNGSTEN CARBIDES; ALLOYS; AROMATICS; BEAMS; CARBIDES; CARBON COMPOUNDS; CHARGED PARTICLES; DOSES; ELECTRON MICROSCOPY; ELEMENTS; ENERGY RANGE; FILMS; HYDROCARBONS; IONS; IRON ALLOYS; IRON BASE ALLOYS; KEV RANGE; MICROSCOPY; NONMETALS; ORGANIC COMPOUNDS; REFRACTORY METAL COMPOUNDS; SPECTRA; TEMPERATURE RANGE; TRANSITION ELEMENT COMPOUNDS; TUNGSTEN COMPOUNDS; 360601* - Other Materials- Preparation & Manufacture; 360606 - Other Materials- Physical Properties- (1992-)
OSTI ID:
7049212
Country of Origin:
Switzerland
Language:
English
Other Identifying Numbers:
Journal ID: ISSN 0257-8972; CODEN: SCTEE
Submitting Site:
INIS
Size:
Pages: 509-513
Announcement Date:

Citation Formats

Awazu, Kaoru, Yoshida, Hiroyuki, Watanabe, Hiroshi, Iwaki, Masaya, and Guzman, L. Effects of ion beam bombardment of carbon thin films deposited onto tungsten carbide and tool steels. Switzerland: N. p., 1992. Web.
Awazu, Kaoru, Yoshida, Hiroyuki, Watanabe, Hiroshi, Iwaki, Masaya, & Guzman, L. Effects of ion beam bombardment of carbon thin films deposited onto tungsten carbide and tool steels. Switzerland.
Awazu, Kaoru, Yoshida, Hiroyuki, Watanabe, Hiroshi, Iwaki, Masaya, and Guzman, L. 1992. "Effects of ion beam bombardment of carbon thin films deposited onto tungsten carbide and tool steels." Switzerland.
@misc{etde_7049212,
title = {Effects of ion beam bombardment of carbon thin films deposited onto tungsten carbide and tool steels}
author = {Awazu, Kaoru, Yoshida, Hiroyuki, Watanabe, Hiroshi, Iwaki, Masaya, and Guzman, L}
abstractNote = {A study was made of the effects of argon ion bombardment of carbon thin films deposited onto WC and tool steels. Carbon thin film deposition was performed at various temperatures ranging from 200degC to 350degC, using C{sub 6}H{sub 6} gas. Argon ion beam bombardment of the films was carried out at an energy of 150 keV with a dose of 1x10{sup 16} ions cm{sup -2}. The hardness and adhesion of the films were measured by means of Knoop hardness and scratch tests respectively. The structure of the carbon films was estimated by laser Raman spectroscopy, and the relations were investigated between the mechanical properties and the structure of the films. The hardness of carbon thin films increases as their deposition temperature decreases; this tendency corresponds to the increase in amorphous structure estimated by Raman spectra. Argon ion bombardment results in constant hardness and fraction of amorphous structure. Argon ion beam bombardment of films prior to additional carbon deposition may cause the adhesion of the subsequently deposited films to improve. It is concluded that argon ion beam bombardment is useful for improving the properties of carbon films deposited onto WC and tool steels. (orig.).}
journal = {Surface and Coatings Technology; (Switzerland)}
volume = {51:1-3}
place = {Switzerland}
year = {1992}
month = {Apr}
}