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Preparation and properties of TiO2 films by complexing agent-assisted sol-gel method. Yuki haiishi wo mochiita sol gel ho ni yoru TiO2 usumaku no sakusei to seishitsu

Journal Article:

Abstract

In order to control optical properties of TiO2 thin films, the TiO2 films were prepared by the sol-gel method using glycols or their ether derivatives as organic ligands to study the effect of the organic ligands on the refractive indices and crystal phases. Samples were prepared as follows: Organic ligand was added into the ethanol solution of Ti(O-iso-pr) 4, and aqueous nitric acid solution was added after reflux, and sol obtained by subsequent reflux was applied on soda lime glass or silicon wafer substrates, which were baked at 400 to 900 centigrade. Three kinds of ligand such as 2-(2-methoxyethoxy) ethanol were used. Measured items are the film thickness, thermal characteristics, crystal phase and refractive indices of thin films. The key points are as follows: In case of TiO2 thin films on the soda lime glass substrate, the changing pattern of refractive indices by temperature changes with the kind of ligand used and further the peak strength of anatase changes with the kind of ligand used. In case of silicon wafer substrates, the peak strength of anatase and rutile changes with the kind of ligand. The refractive indices and crystal phase can be controlled by properly using the ligand. 7 refs.,  More>>
Authors:
Nishide, T; [1]  Mizukami, F [2] 
  1. Nissan Motor Co. Ltd., Tokyo (Japan)
  2. National Chemical Laboratory for Industry, Tsukuba (Japan)
Publication Date:
Sep 01, 1992
Product Type:
Journal Article
Reference Number:
NEDO-92-912970; EDB-93-019605
Resource Relation:
Journal Name: Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi (Journal of the Ceramic Society of Japan); (Japan); Journal Volume: 100:1165
Subject:
36 MATERIALS SCIENCE; LIGANDS; ETHERS; GLYCOLS; ORGANIC COMPOUNDS; SOL-GEL PROCESS; THIN FILMS; CRYSTAL STRUCTURE; REFRACTIVITY; SINTERING; TITANIUM OXIDES; ALCOHOLS; CHALCOGENIDES; FABRICATION; FILMS; HYDROXY COMPOUNDS; OPTICAL PROPERTIES; ORGANIC OXYGEN COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; 360201* - Ceramics, Cermets, & Refractories- Preparation & Fabrication; 360602 - Other Materials- Structure & Phase Studies; 360606 - Other Materials- Physical Properties- (1992-)
OSTI ID:
6906399
Country of Origin:
Japan
Language:
Japanese
Other Identifying Numbers:
Journal ID: ISSN 0914-5400; CODEN: NSKRE2
Submitting Site:
NEDO
Size:
Pages: 1122-1126
Announcement Date:

Journal Article:

Citation Formats

Nishide, T, and Mizukami, F. Preparation and properties of TiO2 films by complexing agent-assisted sol-gel method. Yuki haiishi wo mochiita sol gel ho ni yoru TiO2 usumaku no sakusei to seishitsu. Japan: N. p., 1992. Web.
Nishide, T, & Mizukami, F. Preparation and properties of TiO2 films by complexing agent-assisted sol-gel method. Yuki haiishi wo mochiita sol gel ho ni yoru TiO2 usumaku no sakusei to seishitsu. Japan.
Nishide, T, and Mizukami, F. 1992. "Preparation and properties of TiO2 films by complexing agent-assisted sol-gel method. Yuki haiishi wo mochiita sol gel ho ni yoru TiO2 usumaku no sakusei to seishitsu." Japan.
@misc{etde_6906399,
title = {Preparation and properties of TiO2 films by complexing agent-assisted sol-gel method. Yuki haiishi wo mochiita sol gel ho ni yoru TiO2 usumaku no sakusei to seishitsu}
author = {Nishide, T, and Mizukami, F}
abstractNote = {In order to control optical properties of TiO2 thin films, the TiO2 films were prepared by the sol-gel method using glycols or their ether derivatives as organic ligands to study the effect of the organic ligands on the refractive indices and crystal phases. Samples were prepared as follows: Organic ligand was added into the ethanol solution of Ti(O-iso-pr) 4, and aqueous nitric acid solution was added after reflux, and sol obtained by subsequent reflux was applied on soda lime glass or silicon wafer substrates, which were baked at 400 to 900 centigrade. Three kinds of ligand such as 2-(2-methoxyethoxy) ethanol were used. Measured items are the film thickness, thermal characteristics, crystal phase and refractive indices of thin films. The key points are as follows: In case of TiO2 thin films on the soda lime glass substrate, the changing pattern of refractive indices by temperature changes with the kind of ligand used and further the peak strength of anatase changes with the kind of ligand used. In case of silicon wafer substrates, the peak strength of anatase and rutile changes with the kind of ligand. The refractive indices and crystal phase can be controlled by properly using the ligand. 7 refs., 11 figs.}
journal = {Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi (Journal of the Ceramic Society of Japan); (Japan)}
volume = {100:1165}
journal type = {AC}
place = {Japan}
year = {1992}
month = {Sep}
}