Ion beams with energies as low as a few eV can be used, in the very clean environment of an ultra-high vacuum system, to achieve the fine control for atomic-scale experiments. They are becoming widely used in nanotechnology. Recent advances in beam quality, overcoming the mutual repulsion of the ions, have meant that mass-analysed low energy ion beams have been developed around the world for a variety of applications in material science, and physics. The structure of such devices is outlined and possible future applications noted. (U.K.).