Abstract
In this paper a method for separate measurement of the extinction of optical thin films is presented. The method combines a laser calorimetric technique and a light-scattering goniophotometer. As an example, the spectral extinction properties of r.f. reactively sputtered TiO/sub 2/ films were measured. Under certain conditions absorption indices of 10/sup -5/ or less can be achieved. Thus light scattering, rather than absorption, is the dominant optical loss mechanism in sputtered TiO/sub 2/ films.
Citation Formats
Welsch, E, Lieder, G, Walther, H G, and Hacker, E.
Measurement of the extinction of sputtered TiO/sub 2/ films.
Switzerland: N. p.,
1982.
Web.
doi:10.1016/0040-6090(82)90254-1.
Welsch, E, Lieder, G, Walther, H G, & Hacker, E.
Measurement of the extinction of sputtered TiO/sub 2/ films.
Switzerland.
https://doi.org/10.1016/0040-6090(82)90254-1
Welsch, E, Lieder, G, Walther, H G, and Hacker, E.
1982.
"Measurement of the extinction of sputtered TiO/sub 2/ films."
Switzerland.
https://doi.org/10.1016/0040-6090(82)90254-1.
@misc{etde_6658029,
title = {Measurement of the extinction of sputtered TiO/sub 2/ films}
author = {Welsch, E, Lieder, G, Walther, H G, and Hacker, E}
abstractNote = {In this paper a method for separate measurement of the extinction of optical thin films is presented. The method combines a laser calorimetric technique and a light-scattering goniophotometer. As an example, the spectral extinction properties of r.f. reactively sputtered TiO/sub 2/ films were measured. Under certain conditions absorption indices of 10/sup -5/ or less can be achieved. Thus light scattering, rather than absorption, is the dominant optical loss mechanism in sputtered TiO/sub 2/ films.}
doi = {10.1016/0040-6090(82)90254-1}
journal = []
volume = {91:4}
journal type = {AC}
place = {Switzerland}
year = {1982}
month = {May}
}
title = {Measurement of the extinction of sputtered TiO/sub 2/ films}
author = {Welsch, E, Lieder, G, Walther, H G, and Hacker, E}
abstractNote = {In this paper a method for separate measurement of the extinction of optical thin films is presented. The method combines a laser calorimetric technique and a light-scattering goniophotometer. As an example, the spectral extinction properties of r.f. reactively sputtered TiO/sub 2/ films were measured. Under certain conditions absorption indices of 10/sup -5/ or less can be achieved. Thus light scattering, rather than absorption, is the dominant optical loss mechanism in sputtered TiO/sub 2/ films.}
doi = {10.1016/0040-6090(82)90254-1}
journal = []
volume = {91:4}
journal type = {AC}
place = {Switzerland}
year = {1982}
month = {May}
}