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Compositional study of glow-discharge A-SiC:H films for window layer of solar cells

Journal Article:

Abstract

A series of compositional studies on various types of amorphous silicon-carbon-hydrogen alloy (a-SiC:H) were performed by means of Auger electron spectroscopy (AES) and infrared spectroscopy (IR). The difference between CH4 and C2H4 as a carbon source was examined. From the infrared absorption study it is shown that C2H4-based a-SiC:H films contain carbons as -C2H5 and -CH3,, whereas CH4-based ones as tetrahedral atoms. These results will serve to elucidate the fabrication problems of solar cells. 14 references.
Authors:
Publication Date:
Oct 01, 1983
Product Type:
Journal Article
Reference Number:
EDB-84-183300
Resource Relation:
Journal Name: Technol. Rep. Osaka Univ.; (Japan); Journal Volume: 33
Subject:
14 SOLAR ENERGY; SOLAR CELLS; FILMS; CARBON COMPOUNDS; CHEMICAL COMPOSITION; ENERGY GAP; FABRICATION; GLOW DISCHARGES; HYDROGEN; SEMICONDUCTOR MATERIALS; DIRECT ENERGY CONVERTERS; ELECTRIC DISCHARGES; ELEMENTS; EQUIPMENT; MATERIALS; NONMETALS; PHOTOELECTRIC CELLS; PHOTOVOLTAIC CELLS; SOLAR EQUIPMENT; 140501* - Solar Energy Conversion- Photovoltaic Conversion
OSTI ID:
6431462
Research Organizations:
Osaka Univ., Japan
Country of Origin:
Japan
Language:
English
Other Identifying Numbers:
Journal ID: CODEN: TROUA
Submitting Site:
HEDB
Size:
Pages: 283-288
Announcement Date:
Jul 01, 1984

Journal Article:

Citation Formats

Imura, T, and Hiraki, A. Compositional study of glow-discharge A-SiC:H films for window layer of solar cells. Japan: N. p., 1983. Web.
Imura, T, & Hiraki, A. Compositional study of glow-discharge A-SiC:H films for window layer of solar cells. Japan.
Imura, T, and Hiraki, A. 1983. "Compositional study of glow-discharge A-SiC:H films for window layer of solar cells." Japan.
@misc{etde_6431462,
title = {Compositional study of glow-discharge A-SiC:H films for window layer of solar cells}
author = {Imura, T, and Hiraki, A}
abstractNote = {A series of compositional studies on various types of amorphous silicon-carbon-hydrogen alloy (a-SiC:H) were performed by means of Auger electron spectroscopy (AES) and infrared spectroscopy (IR). The difference between CH4 and C2H4 as a carbon source was examined. From the infrared absorption study it is shown that C2H4-based a-SiC:H films contain carbons as -C2H5 and -CH3,, whereas CH4-based ones as tetrahedral atoms. These results will serve to elucidate the fabrication problems of solar cells. 14 references.}
journal = {Technol. Rep. Osaka Univ.; (Japan)}
volume = {33}
journal type = {AC}
place = {Japan}
year = {1983}
month = {Oct}
}