Abstract
A series of compositional studies on various types of amorphous silicon-carbon-hydrogen alloy (a-SiC:H) were performed by means of Auger electron spectroscopy (AES) and infrared spectroscopy (IR). The difference between CH4 and C2H4 as a carbon source was examined. From the infrared absorption study it is shown that C2H4-based a-SiC:H films contain carbons as -C2H5 and -CH3,, whereas CH4-based ones as tetrahedral atoms. These results will serve to elucidate the fabrication problems of solar cells. 14 references.
Citation Formats
Imura, T, and Hiraki, A.
Compositional study of glow-discharge A-SiC:H films for window layer of solar cells.
Japan: N. p.,
1983.
Web.
Imura, T, & Hiraki, A.
Compositional study of glow-discharge A-SiC:H films for window layer of solar cells.
Japan.
Imura, T, and Hiraki, A.
1983.
"Compositional study of glow-discharge A-SiC:H films for window layer of solar cells."
Japan.
@misc{etde_6431462,
title = {Compositional study of glow-discharge A-SiC:H films for window layer of solar cells}
author = {Imura, T, and Hiraki, A}
abstractNote = {A series of compositional studies on various types of amorphous silicon-carbon-hydrogen alloy (a-SiC:H) were performed by means of Auger electron spectroscopy (AES) and infrared spectroscopy (IR). The difference between CH4 and C2H4 as a carbon source was examined. From the infrared absorption study it is shown that C2H4-based a-SiC:H films contain carbons as -C2H5 and -CH3,, whereas CH4-based ones as tetrahedral atoms. These results will serve to elucidate the fabrication problems of solar cells. 14 references.}
journal = []
volume = {33}
journal type = {AC}
place = {Japan}
year = {1983}
month = {Oct}
}
title = {Compositional study of glow-discharge A-SiC:H films for window layer of solar cells}
author = {Imura, T, and Hiraki, A}
abstractNote = {A series of compositional studies on various types of amorphous silicon-carbon-hydrogen alloy (a-SiC:H) were performed by means of Auger electron spectroscopy (AES) and infrared spectroscopy (IR). The difference between CH4 and C2H4 as a carbon source was examined. From the infrared absorption study it is shown that C2H4-based a-SiC:H films contain carbons as -C2H5 and -CH3,, whereas CH4-based ones as tetrahedral atoms. These results will serve to elucidate the fabrication problems of solar cells. 14 references.}
journal = []
volume = {33}
journal type = {AC}
place = {Japan}
year = {1983}
month = {Oct}
}