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Directed ion beam sputter etching of polytetrafluorethylene (teflon) using an argon ion source

Abstract

Polytetrafluoroethylene (Teflon) tubes of outside diameter 375-625 ..mu..m were perforated by bombarding the tubes with an argon ion beam. Holes of diameter 18 ..mu..m and 40 ..mu..m on a side and open-are ratios of 55% and 65% respectively were formed using electroformed nickel mesh masks. Scanning electron micrographs of the hole walls reveal that they are relatively smooth and that the holes go completely through the tubing walls. Holes with the smoothest walls and the sharpest definition were obtained by using low beam power densities and a tubing target temperature of less than 50/sup 0/C. Volumetric flow rate measurements show that the flow rate through the perforated tubules is 0.2-0.5 cm/sup 3/ min/sup -1/ for a pressure drop across the tubes of 2.2 Torr. The perforated microtubules have an important application in medicine for sufferers of hydrocephalus, a malady which results in the build-up of cerebrospinal fluid in the brain. The perforated tubing is inserted into the ventricle and serves as a shunt by draining off the excess cerebrospinal fluid into another part of the brain, where the fluid is absorbed by normal processes.
Publication Date:
Sep 24, 1982
Product Type:
Conference
Reference Number:
EDB-83-061546
Resource Relation:
Journal Name: Thin Solid Films; (Switzerland); Journal Volume: 95:4; Conference: International conference on metallurgical coatings and process technology, San Diego, CA, USA, 5 - 8 Apr 1982
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 36 MATERIALS SCIENCE; ARGON IONS; COLLISIONS; TEFLON; ETCHING; SPUTTERING; EXPERIMENTAL DATA; FLOW RATE; ION BEAMS; MASKING; MICROTUBULES; SCANNING ELECTRON MICROSCOPY; TUBES; BEAMS; CELL CONSTITUENTS; CHARGED PARTICLES; DATA; ELECTRON MICROSCOPY; FLUORINATED ALIPHATIC HYDROCARBONS; HALOGENATED ALIPHATIC HYDROCARBONS; INFORMATION; IONS; MATERIALS; MICROSCOPY; NUMERICAL DATA; ORGANIC COMPOUNDS; ORGANIC FLUORINE COMPOUNDS; ORGANIC HALOGEN COMPOUNDS; ORGANIC POLYMERS; PETROCHEMICALS; PETROLEUM PRODUCTS; PLASTICS; POLYETHYLENES; POLYMERS; POLYOLEFINS; POLYTETRAFLUOROETHYLENE; SURFACE FINISHING; SYNTHETIC MATERIALS; 640301* - Atomic, Molecular & Chemical Physics- Beams & their Reactions; 360406 - Materials- Polymers & Plastics- Radiation Effects- (-1987)
OSTI ID:
6422330
Country of Origin:
Switzerland
Language:
English
Other Identifying Numbers:
Journal ID: CODEN: THSFA
Submitting Site:
HEDB
Size:
Pages: 351-362
Announcement Date:
Feb 01, 1983

Citation Formats

Garner, C E, Gabriel, S B, and Kuo, Y S. Directed ion beam sputter etching of polytetrafluorethylene (teflon) using an argon ion source. Switzerland: N. p., 1982. Web.
Garner, C E, Gabriel, S B, & Kuo, Y S. Directed ion beam sputter etching of polytetrafluorethylene (teflon) using an argon ion source. Switzerland.
Garner, C E, Gabriel, S B, and Kuo, Y S. 1982. "Directed ion beam sputter etching of polytetrafluorethylene (teflon) using an argon ion source." Switzerland.
@misc{etde_6422330,
title = {Directed ion beam sputter etching of polytetrafluorethylene (teflon) using an argon ion source}
author = {Garner, C E, Gabriel, S B, and Kuo, Y S}
abstractNote = {Polytetrafluoroethylene (Teflon) tubes of outside diameter 375-625 ..mu..m were perforated by bombarding the tubes with an argon ion beam. Holes of diameter 18 ..mu..m and 40 ..mu..m on a side and open-are ratios of 55% and 65% respectively were formed using electroformed nickel mesh masks. Scanning electron micrographs of the hole walls reveal that they are relatively smooth and that the holes go completely through the tubing walls. Holes with the smoothest walls and the sharpest definition were obtained by using low beam power densities and a tubing target temperature of less than 50/sup 0/C. Volumetric flow rate measurements show that the flow rate through the perforated tubules is 0.2-0.5 cm/sup 3/ min/sup -1/ for a pressure drop across the tubes of 2.2 Torr. The perforated microtubules have an important application in medicine for sufferers of hydrocephalus, a malady which results in the build-up of cerebrospinal fluid in the brain. The perforated tubing is inserted into the ventricle and serves as a shunt by draining off the excess cerebrospinal fluid into another part of the brain, where the fluid is absorbed by normal processes.}
journal = []
volume = {95:4}
place = {Switzerland}
year = {1982}
month = {Sep}
}