The transition to planar tecnology has lead to substantial improvement of energy resolution of Si detectors of strongly ionizing nuclear radiations. For 5 MeV ..cap alpha..-particles the resolution (delta/sub ..cap alpha../) is equal 9.2 keV. The application of the method of local diffusion permitted to attain delta/sub ..cap alpha../=8.1-8.4 keV. The comparison of the new resolution level with the theoretical limit is carried out. It is shown that the combination of partial contributions of fluctuations caused by fundamental mechanisms practically determined delta/sub ..cap alpha../ of obtained detectors.