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Development of optical interference-type micro accelerometer for subsurface microseismic measurement; Micromachining ni yoru chika danseiha keisoku no tame no hikari kanshogata kasokudo sensor no kaihatsu

Abstract

Manufacture is under way of an optical interference-type micro accelerometer making use of the micromachining technology and an optical fiber measuring system for detecting microseismic waves in the ground. The sensor is required to be capable of detecting acceleration 0.1-1gal in amplitude, to be flat in amplitude characteristic in a frequency range of 10Hz-several kHz, to be ensured of straight phase characteristics to enable the measurement of transient phenomena, to be low in cross sensitivity, and to be high in resistance to water, pressure, and heat. The sensor is constructed in the following way. In the process for treating silicon, anisotropic etching is performed for the formation of a gap between the fiber end face and oscillator, boron is diffused, a stopper is formed, and then the silicon is subjected to penetrating etching. In the process for the optical fiber section, an optical fiber is inserted into a glass tube and fixed by an adhesive agent, and then the glass tube end face is polished, this together with the fiber end. Indium-tin oxide is sputtered onto the glass tube end. Finally, the sensor is assembled. 5 refs., 4 figs., 1 tab.
Authors:
Hirata, K; Niitsuma, H; Esashi, M [1] 
  1. Tohoku University, Sendai (Japan). Faculty of Engineering
Publication Date:
Oct 22, 1997
Product Type:
Conference
Report Number:
ETDE/JP-98751022; CONF-9710214-
Reference Number:
SCA: 440700; 426000; PA: JP-97:0G4548; EDB-98:075710; SN: 98001944484
Resource Relation:
Conference: 97. SEGJ conference, Butsuri tansa gakkai dai 97 kai (1997 nendo shuki) gakujutsu koenkai, Sapporo (Japan), 22-24 Oct 1997; Other Information: PBD: 22 Oct 1997; Related Information: Is Part Of Proceeding of the 97th (Fall, Fiscal 1997) SEGJ Conference; PB: 371 p.; Butsuri tansa gakkai dai 97 kai (1997 nendo shuki) gakujutsu koenkai koen ronbunshu
Subject:
44 INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS; 42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; PROBES; SEISMIC WAVES; ACCELEROMETERS; INTERFEROMETRY; FREQUENCY RANGE; TRANSIENTS; SENSITIVITY; OPTICAL FIBERS; ABRASION; HEAT RESISTANT MATERIALS
OSTI ID:
622716
Research Organizations:
Society of Exploration Geophysicists of Japan, Tokyo (Japan)
Country of Origin:
Japan
Language:
Japanese
Other Identifying Numbers:
Other: ON: DE98751022; TRN: JN97G4548
Availability:
Available from Society of Exploration Geophysicists of Japan, 2-18, Nakamagome 2-chome, Ota-ku, Tokyo, (Japan); OSTI as DE98751022
Submitting Site:
NEDO
Size:
pp. 165-168
Announcement Date:

Citation Formats

Hirata, K, Niitsuma, H, and Esashi, M. Development of optical interference-type micro accelerometer for subsurface microseismic measurement; Micromachining ni yoru chika danseiha keisoku no tame no hikari kanshogata kasokudo sensor no kaihatsu. Japan: N. p., 1997. Web.
Hirata, K, Niitsuma, H, & Esashi, M. Development of optical interference-type micro accelerometer for subsurface microseismic measurement; Micromachining ni yoru chika danseiha keisoku no tame no hikari kanshogata kasokudo sensor no kaihatsu. Japan.
Hirata, K, Niitsuma, H, and Esashi, M. 1997. "Development of optical interference-type micro accelerometer for subsurface microseismic measurement; Micromachining ni yoru chika danseiha keisoku no tame no hikari kanshogata kasokudo sensor no kaihatsu." Japan.
@misc{etde_622716,
title = {Development of optical interference-type micro accelerometer for subsurface microseismic measurement; Micromachining ni yoru chika danseiha keisoku no tame no hikari kanshogata kasokudo sensor no kaihatsu}
author = {Hirata, K, Niitsuma, H, and Esashi, M}
abstractNote = {Manufacture is under way of an optical interference-type micro accelerometer making use of the micromachining technology and an optical fiber measuring system for detecting microseismic waves in the ground. The sensor is required to be capable of detecting acceleration 0.1-1gal in amplitude, to be flat in amplitude characteristic in a frequency range of 10Hz-several kHz, to be ensured of straight phase characteristics to enable the measurement of transient phenomena, to be low in cross sensitivity, and to be high in resistance to water, pressure, and heat. The sensor is constructed in the following way. In the process for treating silicon, anisotropic etching is performed for the formation of a gap between the fiber end face and oscillator, boron is diffused, a stopper is formed, and then the silicon is subjected to penetrating etching. In the process for the optical fiber section, an optical fiber is inserted into a glass tube and fixed by an adhesive agent, and then the glass tube end face is polished, this together with the fiber end. Indium-tin oxide is sputtered onto the glass tube end. Finally, the sensor is assembled. 5 refs., 4 figs., 1 tab.}
place = {Japan}
year = {1997}
month = {Oct}
}