Abstract
Wear-resistant coatings of zirconium boride and zirconium boron nitride were deposited on steel and molybdenum substrates employing non-reactive as well as reactive d.c. magnetron sputtering using zirconium diboride targets. The characterization of the coatings was done by means of scanning electron microscopy, transmission electron microscopy and X-ray diffraction. The results are discussed in connection with measured mechanical coating properties such as microhardness and adhesion. The optical properties of the coatings were determined using a CIE-L{sup *}a{sup *}b{sup *} colorimeter and specialized corrosion and abrasion tests. Non-reactive sputtering using ZrB{sub 2} targets results in the formation of coatings with a columnar structure and predominantly (001)-orientated ZrB{sub 2} crystals. Coatings deposited at low nitrogen flow rates exhibit very fine-grained or even fracture amorphous structures with a hexagonal Zr-B-N phase derived from the ZrB{sub 2} lattice. A further increase of the nitrogen flow leads to an amorphous film growth. The maximum Vickers microhardness of the coatings was found to be approximately 2300 HV 0.02. Zr-B and Zr-B-N coatings offer a wide range of interesting colours as well as good corrosion and wear resistance. (orig.).
Mitterer, C;
Uebleis, A;
Ebner, R
[1]
- Inst. fuer Metallkunde und Werkstoffpruefung, Montanuniv., Leoben (Austria)
Citation Formats
Mitterer, C, Uebleis, A, and Ebner, R.
Sputter deposition of wear-resistant coatings within the system Zr-B-N.
Switzerland: N. p.,
1991.
Web.
doi:10.1016/0921-5093(91)90494-8.
Mitterer, C, Uebleis, A, & Ebner, R.
Sputter deposition of wear-resistant coatings within the system Zr-B-N.
Switzerland.
https://doi.org/10.1016/0921-5093(91)90494-8
Mitterer, C, Uebleis, A, and Ebner, R.
1991.
"Sputter deposition of wear-resistant coatings within the system Zr-B-N."
Switzerland.
https://doi.org/10.1016/0921-5093(91)90494-8.
@misc{etde_6051324,
title = {Sputter deposition of wear-resistant coatings within the system Zr-B-N}
author = {Mitterer, C, Uebleis, A, and Ebner, R}
abstractNote = {Wear-resistant coatings of zirconium boride and zirconium boron nitride were deposited on steel and molybdenum substrates employing non-reactive as well as reactive d.c. magnetron sputtering using zirconium diboride targets. The characterization of the coatings was done by means of scanning electron microscopy, transmission electron microscopy and X-ray diffraction. The results are discussed in connection with measured mechanical coating properties such as microhardness and adhesion. The optical properties of the coatings were determined using a CIE-L{sup *}a{sup *}b{sup *} colorimeter and specialized corrosion and abrasion tests. Non-reactive sputtering using ZrB{sub 2} targets results in the formation of coatings with a columnar structure and predominantly (001)-orientated ZrB{sub 2} crystals. Coatings deposited at low nitrogen flow rates exhibit very fine-grained or even fracture amorphous structures with a hexagonal Zr-B-N phase derived from the ZrB{sub 2} lattice. A further increase of the nitrogen flow leads to an amorphous film growth. The maximum Vickers microhardness of the coatings was found to be approximately 2300 HV 0.02. Zr-B and Zr-B-N coatings offer a wide range of interesting colours as well as good corrosion and wear resistance. (orig.).}
doi = {10.1016/0921-5093(91)90494-8}
journal = []
volume = {140:1/2}
place = {Switzerland}
year = {1991}
month = {Jul}
}
title = {Sputter deposition of wear-resistant coatings within the system Zr-B-N}
author = {Mitterer, C, Uebleis, A, and Ebner, R}
abstractNote = {Wear-resistant coatings of zirconium boride and zirconium boron nitride were deposited on steel and molybdenum substrates employing non-reactive as well as reactive d.c. magnetron sputtering using zirconium diboride targets. The characterization of the coatings was done by means of scanning electron microscopy, transmission electron microscopy and X-ray diffraction. The results are discussed in connection with measured mechanical coating properties such as microhardness and adhesion. The optical properties of the coatings were determined using a CIE-L{sup *}a{sup *}b{sup *} colorimeter and specialized corrosion and abrasion tests. Non-reactive sputtering using ZrB{sub 2} targets results in the formation of coatings with a columnar structure and predominantly (001)-orientated ZrB{sub 2} crystals. Coatings deposited at low nitrogen flow rates exhibit very fine-grained or even fracture amorphous structures with a hexagonal Zr-B-N phase derived from the ZrB{sub 2} lattice. A further increase of the nitrogen flow leads to an amorphous film growth. The maximum Vickers microhardness of the coatings was found to be approximately 2300 HV 0.02. Zr-B and Zr-B-N coatings offer a wide range of interesting colours as well as good corrosion and wear resistance. (orig.).}
doi = {10.1016/0921-5093(91)90494-8}
journal = []
volume = {140:1/2}
place = {Switzerland}
year = {1991}
month = {Jul}
}