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Sputter deposition of wear-resistant coatings within the system Zr-B-N

Abstract

Wear-resistant coatings of zirconium boride and zirconium boron nitride were deposited on steel and molybdenum substrates employing non-reactive as well as reactive d.c. magnetron sputtering using zirconium diboride targets. The characterization of the coatings was done by means of scanning electron microscopy, transmission electron microscopy and X-ray diffraction. The results are discussed in connection with measured mechanical coating properties such as microhardness and adhesion. The optical properties of the coatings were determined using a CIE-L{sup *}a{sup *}b{sup *} colorimeter and specialized corrosion and abrasion tests. Non-reactive sputtering using ZrB{sub 2} targets results in the formation of coatings with a columnar structure and predominantly (001)-orientated ZrB{sub 2} crystals. Coatings deposited at low nitrogen flow rates exhibit very fine-grained or even fracture amorphous structures with a hexagonal Zr-B-N phase derived from the ZrB{sub 2} lattice. A further increase of the nitrogen flow leads to an amorphous film growth. The maximum Vickers microhardness of the coatings was found to be approximately 2300 HV 0.02. Zr-B and Zr-B-N coatings offer a wide range of interesting colours as well as good corrosion and wear resistance. (orig.).
Authors:
Mitterer, C; Uebleis, A; Ebner, R [1] 
  1. Inst. fuer Metallkunde und Werkstoffpruefung, Montanuniv., Leoben (Austria)
Publication Date:
Jul 07, 1991
Product Type:
Conference
Report Number:
CONF-900933-
Reference Number:
CHF-92-0F0236; EDB-92-033945
Resource Relation:
Journal Name: Materials Science and Engineering. A, Structural Materials: Properties, Microstructure and Processing; (Switzerland); Journal Volume: 140:1/2; Conference: 2. international conference on plasma surface engineering, Garmisch-Partenkirchen (Germany), 10-14 Sep 1990
Subject:
36 MATERIALS SCIENCE; ZIRCONIUM BORIDES; COATINGS; WEAR RESISTANCE; ZIRCONIUM NITRIDES; ABRASION; ADHESION; AMORPHOUS STATE; BORON NITRIDES; CORROSION; ELECTRON DIFFRACTION; HEXAGONAL LATTICES; MECHANICAL PROPERTIES; MICROHARDNESS; MOLYBDENUM; OPTICAL PROPERTIES; SCANNING ELECTRON MICROSCOPY; SPUTTERING; TITANIUM BORIDES; TRANSMISSION ELECTRON MICROSCOPY; VICKERS HARDNESS; X-RAY DIFFRACTION; BORIDES; BORON COMPOUNDS; CHEMICAL REACTIONS; COHERENT SCATTERING; CRYSTAL LATTICES; CRYSTAL STRUCTURE; DIFFRACTION; ELECTRON MICROSCOPY; ELEMENTS; HARDNESS; METALS; MICROSCOPY; NITRIDES; NITROGEN COMPOUNDS; PHYSICAL PROPERTIES; PNICTIDES; SCATTERING; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS; ZIRCONIUM COMPOUNDS; 360201* - Ceramics, Cermets, & Refractories- Preparation & Fabrication; 360203 - Ceramics, Cermets, & Refractories- Mechanical Properties
OSTI ID:
6051324
Country of Origin:
Switzerland
Language:
English
Other Identifying Numbers:
Journal ID: ISSN 0921-5093; CODEN: MSAPE
Submitting Site:
HEDB
Size:
Pages: 670-675
Announcement Date:
Mar 15, 1992

Citation Formats

Mitterer, C, Uebleis, A, and Ebner, R. Sputter deposition of wear-resistant coatings within the system Zr-B-N. Switzerland: N. p., 1991. Web. doi:10.1016/0921-5093(91)90494-8.
Mitterer, C, Uebleis, A, & Ebner, R. Sputter deposition of wear-resistant coatings within the system Zr-B-N. Switzerland. https://doi.org/10.1016/0921-5093(91)90494-8
Mitterer, C, Uebleis, A, and Ebner, R. 1991. "Sputter deposition of wear-resistant coatings within the system Zr-B-N." Switzerland. https://doi.org/10.1016/0921-5093(91)90494-8.
@misc{etde_6051324,
title = {Sputter deposition of wear-resistant coatings within the system Zr-B-N}
author = {Mitterer, C, Uebleis, A, and Ebner, R}
abstractNote = {Wear-resistant coatings of zirconium boride and zirconium boron nitride were deposited on steel and molybdenum substrates employing non-reactive as well as reactive d.c. magnetron sputtering using zirconium diboride targets. The characterization of the coatings was done by means of scanning electron microscopy, transmission electron microscopy and X-ray diffraction. The results are discussed in connection with measured mechanical coating properties such as microhardness and adhesion. The optical properties of the coatings were determined using a CIE-L{sup *}a{sup *}b{sup *} colorimeter and specialized corrosion and abrasion tests. Non-reactive sputtering using ZrB{sub 2} targets results in the formation of coatings with a columnar structure and predominantly (001)-orientated ZrB{sub 2} crystals. Coatings deposited at low nitrogen flow rates exhibit very fine-grained or even fracture amorphous structures with a hexagonal Zr-B-N phase derived from the ZrB{sub 2} lattice. A further increase of the nitrogen flow leads to an amorphous film growth. The maximum Vickers microhardness of the coatings was found to be approximately 2300 HV 0.02. Zr-B and Zr-B-N coatings offer a wide range of interesting colours as well as good corrosion and wear resistance. (orig.).}
doi = {10.1016/0921-5093(91)90494-8}
journal = []
volume = {140:1/2}
place = {Switzerland}
year = {1991}
month = {Jul}
}