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Degradation of SiGe devices by proton irradiation

Abstract

The degradation and recovery behavior of strained Si{sub 1-x}Ge{sub x} diodes and heterojunction bipolar transistors (HBTs) by irradiated by protons are studied. The degradation of device performance and the generation of lattice defects are reported as a function of fluence and germanium content and also compared extensively with previous results obtained on electron and neutron irradiated devices. In order to study the recovery behavior of the irradiated devices, isochronal annealing is performed. The radiation source dependence of the degradation is discussed taking into account the number of knock-on atoms and the nonionizing energy loss (NIEL). (author)
Authors:
Ohyama, Hidenori; Hayama, Kiyoteru; [1]  Vanhellemont, J; Takami, Yasukiyo; Sunaga, Hiromi; Nashiyama, Isamu; Uwatoko, Yoshiya; Poortmans, J; Caymax, M
  1. Kumamoto National Coll. of Technology, Nishigoshi (Japan)
Publication Date:
Mar 01, 1997
Product Type:
Conference
Report Number:
JAERI-Conf-97-003; CONF-9603254-
Reference Number:
SCA: 360605; PA: JPN-97:010120; EDB-98:044331; SN: 98001890463
Resource Relation:
Journal Volume: 50; Journal Issue: 4; Conference: 7. international symposium on advanced nuclear energy research, Takasaki (Japan), 18-20 Mar 1996; Other Information: PBD: Mar 1997; Related Information: Is Part Of Recent progress in accelerator beam application. Proceedings of the 7th international symposium on advanced nuclear energy research; PB: 553 p.
Subject:
36 MATERIALS SCIENCE; SILICON COMPOUNDS; GERMANIDES; LAYERS; TRANSISTORS; SEMICONDUCTOR DIODES; SEMICONDUCTOR DEVICES; HETEROJUNCTIONS; PROTON BEAMS; EPITAXY; PHYSICAL RADIATION EFFECTS; DOSE-RESPONSE RELATIONSHIPS; ANNEALING; MEV RANGE 10-100
OSTI ID:
598298
Research Organizations:
Japan Atomic Energy Research Inst., Tokyo (Japan)
Country of Origin:
Japan
Language:
English
Other Identifying Numbers:
Journal ID: ISSN 0969-806X; Other: ON: DE97764433; TRN: JP9710120
Availability:
OSTI as DE97764433
Submitting Site:
JPN
Size:
pp. 212-217
Announcement Date:
May 26, 1998

Citation Formats

Ohyama, Hidenori, Hayama, Kiyoteru, Vanhellemont, J, Takami, Yasukiyo, Sunaga, Hiromi, Nashiyama, Isamu, Uwatoko, Yoshiya, Poortmans, J, and Caymax, M. Degradation of SiGe devices by proton irradiation. Japan: N. p., 1997. Web. doi:10.1016/S0969-806X(97)00044-3.
Ohyama, Hidenori, Hayama, Kiyoteru, Vanhellemont, J, Takami, Yasukiyo, Sunaga, Hiromi, Nashiyama, Isamu, Uwatoko, Yoshiya, Poortmans, J, & Caymax, M. Degradation of SiGe devices by proton irradiation. Japan. https://doi.org/10.1016/S0969-806X(97)00044-3
Ohyama, Hidenori, Hayama, Kiyoteru, Vanhellemont, J, Takami, Yasukiyo, Sunaga, Hiromi, Nashiyama, Isamu, Uwatoko, Yoshiya, Poortmans, J, and Caymax, M. 1997. "Degradation of SiGe devices by proton irradiation." Japan. https://doi.org/10.1016/S0969-806X(97)00044-3.
@misc{etde_598298,
title = {Degradation of SiGe devices by proton irradiation}
author = {Ohyama, Hidenori, Hayama, Kiyoteru, Vanhellemont, J, Takami, Yasukiyo, Sunaga, Hiromi, Nashiyama, Isamu, Uwatoko, Yoshiya, Poortmans, J, and Caymax, M}
abstractNote = {The degradation and recovery behavior of strained Si{sub 1-x}Ge{sub x} diodes and heterojunction bipolar transistors (HBTs) by irradiated by protons are studied. The degradation of device performance and the generation of lattice defects are reported as a function of fluence and germanium content and also compared extensively with previous results obtained on electron and neutron irradiated devices. In order to study the recovery behavior of the irradiated devices, isochronal annealing is performed. The radiation source dependence of the degradation is discussed taking into account the number of knock-on atoms and the nonionizing energy loss (NIEL). (author)}
doi = {10.1016/S0969-806X(97)00044-3}
issue = {4}
volume = {50}
place = {Japan}
year = {1997}
month = {Mar}
}