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Proton irradiation effects in silicon devices

Abstract

Proton irradiation effects in silicon devices are studied for components fabricated in various substrates in order to reveal possible hardening effects. The degradation of p-n junction diodes increases in first order proportionally with the fluence, when submitted to 10 MeV proton irradiations in the range 5x10{sup 9} cm{sup -2} to 5x10{sup 11} cm{sup -2}. The damage coefficients for both p- and n-type Czochralski, Float-Zone and epitaxial wafers are reported. Charge-Coupled Devices fabricated in a 1.2 {mu}m CCD-CMOS technology are shown to be quite resistant to 59 MeV H{sup +} irradiations, irrespective of the substrate type. (author)
Authors:
Simoen, E; Vanhellemont, J; Alaerts, A [1] 
  1. IMEC, Leuven (Belgium); and others
Publication Date:
Mar 01, 1997
Product Type:
Conference
Report Number:
JAERI-Conf-97-003; CONF-9603254-
Reference Number:
SCA: 360605; PA: JPN-97:010122; EDB-98:044338; SN: 98001890465
Resource Relation:
Conference: 7. international symposium on advanced nuclear energy research, Takasaki (Japan), 18-20 Mar 1996; Other Information: PBD: Mar 1997; Related Information: Is Part Of Recent progress in accelerator beam application. Proceedings of the 7th international symposium on advanced nuclear energy research; PB: 553 p.
Subject:
36 MATERIALS SCIENCE; SILICON DIODES; MOS TRANSISTORS; P-N JUNCTIONS; CHARGE-COUPLED DEVICES; PHYSICAL RADIATION EFFECTS; PROTON BEAMS; MEV RANGE 01-10; RADIATION HARDENING
OSTI ID:
598296
Research Organizations:
Japan Atomic Energy Research Inst., Tokyo (Japan)
Country of Origin:
Japan
Language:
English
Other Identifying Numbers:
Other: ON: DE97764433; TRN: JP9710122
Availability:
OSTI as DE97764433
Submitting Site:
JPN
Size:
pp. 224-229
Announcement Date:
May 26, 1998

Citation Formats

Simoen, E, Vanhellemont, J, and Alaerts, A. Proton irradiation effects in silicon devices. Japan: N. p., 1997. Web.
Simoen, E, Vanhellemont, J, & Alaerts, A. Proton irradiation effects in silicon devices. Japan.
Simoen, E, Vanhellemont, J, and Alaerts, A. 1997. "Proton irradiation effects in silicon devices." Japan.
@misc{etde_598296,
title = {Proton irradiation effects in silicon devices}
author = {Simoen, E, Vanhellemont, J, and Alaerts, A}
abstractNote = {Proton irradiation effects in silicon devices are studied for components fabricated in various substrates in order to reveal possible hardening effects. The degradation of p-n junction diodes increases in first order proportionally with the fluence, when submitted to 10 MeV proton irradiations in the range 5x10{sup 9} cm{sup -2} to 5x10{sup 11} cm{sup -2}. The damage coefficients for both p- and n-type Czochralski, Float-Zone and epitaxial wafers are reported. Charge-Coupled Devices fabricated in a 1.2 {mu}m CCD-CMOS technology are shown to be quite resistant to 59 MeV H{sup +} irradiations, irrespective of the substrate type. (author)}
place = {Japan}
year = {1997}
month = {Mar}
}