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Clean room actuators

Journal Article:

Abstract

This report explains on the present status of the clean room actuators including the author's research results. In a clean room, there exists a possibility of dust generation, even when a direct human work is eliminated by the use of robots or automatic machines, from the machines themselves. For this, it is important to develop such clean robots and transfer/positioning mechanism that do not generate dusts, and to develop an actuator and its control technique. Topics described in the report are as follows: 1. Prevention of dust diffusion by means of sealing. 2. Elimination of mechanical contact (Linear induction motor and pneumatic float, linear motor and magnetic attraction float, linear motor and air bearing, and magnetic bearing). 3. Contactless actuator having a positioning mechanism (Use of linear step motor and rotary contactless actuator). (15 figs, 11 refs)
Authors:
Publication Date:
Jun 01, 1987
Product Type:
Journal Article
Reference Number:
NEDO-87-930020; EDB-88-009171
Resource Relation:
Journal Name: Seisan Kenkyu; (Japan); Journal Volume: 39:6
Subject:
32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION; CLEAN ROOMS; ACTUATORS; CONTAMINATION; CONTROLLED ATMOSPHERES; ATMOSPHERES; 320106* - Energy Conservation, Consumption, & Utilization- Building Equipment- (1987-)
OSTI ID:
5978850
Research Organizations:
Inst. of Industrial Science, Univ. of Tokyo, Tokyo, Japan
Country of Origin:
Japan
Language:
Japanese
Other Identifying Numbers:
Journal ID: CODEN: SEKEA
Submitting Site:
NEDO
Size:
Pages: 11-16
Announcement Date:
Dec 01, 1987

Journal Article:

Citation Formats

Higuchi, Toshiro. Clean room actuators. Japan: N. p., 1987. Web.
Higuchi, Toshiro. Clean room actuators. Japan.
Higuchi, Toshiro. 1987. "Clean room actuators." Japan.
@misc{etde_5978850,
title = {Clean room actuators}
author = {Higuchi, Toshiro}
abstractNote = {This report explains on the present status of the clean room actuators including the author's research results. In a clean room, there exists a possibility of dust generation, even when a direct human work is eliminated by the use of robots or automatic machines, from the machines themselves. For this, it is important to develop such clean robots and transfer/positioning mechanism that do not generate dusts, and to develop an actuator and its control technique. Topics described in the report are as follows: 1. Prevention of dust diffusion by means of sealing. 2. Elimination of mechanical contact (Linear induction motor and pneumatic float, linear motor and magnetic attraction float, linear motor and air bearing, and magnetic bearing). 3. Contactless actuator having a positioning mechanism (Use of linear step motor and rotary contactless actuator). (15 figs, 11 refs)}
journal = {Seisan Kenkyu; (Japan)}
volume = {39:6}
journal type = {AC}
place = {Japan}
year = {1987}
month = {Jun}
}