Abstract
Advances in positron annihilation microprobe development are reviewed. The present resolution achievable is 3 {mu}m. The ultimate resolution is expected to be 0.1 {mu}m which will enable the positron microprobe to be a valuable tool in the development of 0.1 {mu}m scale electronic devices in the future. (author)
Canter, K F
[1]
- Brandeis Univ., Waltham, MA (United States)
Citation Formats
Canter, K F.
Positron annihilation microprobe.
Japan: N. p.,
1997.
Web.
Canter, K F.
Positron annihilation microprobe.
Japan.
Canter, K F.
1997.
"Positron annihilation microprobe."
Japan.
@misc{etde_588341,
title = {Positron annihilation microprobe}
author = {Canter, K F}
abstractNote = {Advances in positron annihilation microprobe development are reviewed. The present resolution achievable is 3 {mu}m. The ultimate resolution is expected to be 0.1 {mu}m which will enable the positron microprobe to be a valuable tool in the development of 0.1 {mu}m scale electronic devices in the future. (author)}
place = {Japan}
year = {1997}
month = {Mar}
}
title = {Positron annihilation microprobe}
author = {Canter, K F}
abstractNote = {Advances in positron annihilation microprobe development are reviewed. The present resolution achievable is 3 {mu}m. The ultimate resolution is expected to be 0.1 {mu}m which will enable the positron microprobe to be a valuable tool in the development of 0.1 {mu}m scale electronic devices in the future. (author)}
place = {Japan}
year = {1997}
month = {Mar}
}