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Positron annihilation microprobe

Abstract

Advances in positron annihilation microprobe development are reviewed. The present resolution achievable is 3 {mu}m. The ultimate resolution is expected to be 0.1 {mu}m which will enable the positron microprobe to be a valuable tool in the development of 0.1 {mu}m scale electronic devices in the future. (author)
Authors:
Canter, K F [1] 
  1. Brandeis Univ., Waltham, MA (United States)
Publication Date:
Mar 01, 1997
Product Type:
Conference
Report Number:
JAERI-Conf-97-003; CONF-9603254-
Reference Number:
SCA: 665100; PA: JPN-97:010106; EDB-98:041152; SN: 98001890449
Resource Relation:
Conference: 7. international symposium on advanced nuclear energy research, Takasaki (Japan), 18-20 Mar 1996; Other Information: PBD: Mar 1997; Related Information: Is Part Of Recent progress in accelerator beam application. Proceedings of the 7th international symposium on advanced nuclear energy research; PB: 553 p.
Subject:
66 PHYSICS; POSITRON BEAMS; ANNIHILATION; CRYSTAL DEFECTS; RESOLUTION; PROBES; SIZE; BRIGHTNESS; BEAM EMITTANCE; DEPTH; MICROSTRUCTURE
OSTI ID:
588341
Research Organizations:
Japan Atomic Energy Research Inst., Tokyo (Japan)
Country of Origin:
Japan
Language:
English
Other Identifying Numbers:
Other: ON: DE97764433; TRN: JP9710106
Availability:
OSTI as DE97764433
Submitting Site:
JPN
Size:
pp. 139-142
Announcement Date:

Citation Formats

Canter, K F. Positron annihilation microprobe. Japan: N. p., 1997. Web.
Canter, K F. Positron annihilation microprobe. Japan.
Canter, K F. 1997. "Positron annihilation microprobe." Japan.
@misc{etde_588341,
title = {Positron annihilation microprobe}
author = {Canter, K F}
abstractNote = {Advances in positron annihilation microprobe development are reviewed. The present resolution achievable is 3 {mu}m. The ultimate resolution is expected to be 0.1 {mu}m which will enable the positron microprobe to be a valuable tool in the development of 0.1 {mu}m scale electronic devices in the future. (author)}
place = {Japan}
year = {1997}
month = {Mar}
}