You need JavaScript to view this

Research and development of advanced materials using ion beam

Abstract

A wide range of research and development activities of advanced material synthesis using ion beams will be discussed, including ion beam applications to the state-of-the-art electronics from giant to nano electronics. (author)
Authors:
Namba, Susumu [1] 
  1. Nagasaki Inst. of Applied Science, Nagasaki (Japan)
Publication Date:
Mar 01, 1997
Product Type:
Conference
Report Number:
JAERI-Conf-97-003; CONF-9603254-
Reference Number:
SCA: 665300; PA: JPN-97:010082; EDB-98:041204; SN: 98001890425
Resource Relation:
Conference: 7. international symposium on advanced nuclear energy research, Takasaki (Japan), 18-20 Mar 1996; Other Information: PBD: Mar 1997; Related Information: Is Part Of Recent progress in accelerator beam application. Proceedings of the 7th international symposium on advanced nuclear energy research; PB: 553 p.
Subject:
66 PHYSICS; MATERIALS; ION BEAMS; IRRADIATION; MICROELECTRONICS; SYNTHESIS; SEMICONDUCTOR DIODES; ION IMPLANTATION; SILICON; DEPTH; CLUSTER BEAMS
OSTI ID:
588272
Research Organizations:
Japan Atomic Energy Research Inst., Tokyo (Japan)
Country of Origin:
Japan
Language:
English
Other Identifying Numbers:
Other: ON: DE97764433; TRN: JP9710082
Availability:
OSTI as DE97764433
Submitting Site:
JPN
Size:
pp. 13-21
Announcement Date:

Citation Formats

Namba, Susumu. Research and development of advanced materials using ion beam. Japan: N. p., 1997. Web.
Namba, Susumu. Research and development of advanced materials using ion beam. Japan.
Namba, Susumu. 1997. "Research and development of advanced materials using ion beam." Japan.
@misc{etde_588272,
title = {Research and development of advanced materials using ion beam}
author = {Namba, Susumu}
abstractNote = {A wide range of research and development activities of advanced material synthesis using ion beams will be discussed, including ion beam applications to the state-of-the-art electronics from giant to nano electronics. (author)}
place = {Japan}
year = {1997}
month = {Mar}
}