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Study of the ablation of extra-low temperature aggregate target and the development of technology of formation of non-equilibrium high-quality functional thin films by the plume control; Gokuteion gyoshutai target no abureshon oyobi purumu seigyo ni yoru hiheiko kohinshitsu kinosei usumaku seisei gijutsu kaihatsu ni kansuru kenkyu

Abstract

A study was made on factors of the formation of high-quality thin films in the pulse laser deposition (PLD) method, a synthesis method of high-grade functional material thin films. In the experiment, plume current measurements using Cu target were conducted for the control of electric and magnetic fields. Especially, the measuring evaluation was made of the two-dimensional distribution including not only the central part of the substrate placed opposite to the target, but the periphery of the substrate. As a result, the following was found out. The distribution of charged particles in the plume is different in positive charge and negative charge, and the negative charge is dispersed/distributed more widely. Accelerating/decelerating effects of charged particles by the electric field are saturated when the bias voltage absolute value is approximately 100V. Ionization is promoted by giving the magnetic field, and the plume distribution is expanded. Positive charged particles of the plume in the magnetic field are decelerated. In the distribution control by giving the electric field, it is effective to think improvement of the distribution not by attracting charged particles by the electric field, but by shutting out charged particles of the same polarity. 29 refs., 75 figs., 2 tabs.
Authors:
"NONE"
Publication Date:
Mar 01, 1997
Product Type:
Technical Report
Report Number:
NEDO-ITK-9613
Reference Number:
SCA: 320303; 400201; PA: JP-97:0B0112; EDB-98:038459; NTS-98:004719; SN: 98001917253
Resource Relation:
Other Information: PBD: Mar 1997
Subject:
32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION; 40 CHEMISTRY; CONTROL; MAGNETIC FIELDS; ELECTRIC FIELDS; THIN FILMS; ABLATION; PLUMES; ENERGY BEAM DEPOSITION; SYNTHESIS; COPPER; LASER TARGETS; CHARGED PARTICLES
OSTI ID:
587561
Research Organizations:
New Energy and Industrial Technology Development Organization, Tokyo (Japan)
Country of Origin:
Japan
Language:
Japanese
Other Identifying Numbers:
Other: ON: DE98735446; TRN: JN97B0112
Availability:
OSTI as DE98735446
Submitting Site:
NEDO
Size:
199 p.
Announcement Date:

Citation Formats

Study of the ablation of extra-low temperature aggregate target and the development of technology of formation of non-equilibrium high-quality functional thin films by the plume control; Gokuteion gyoshutai target no abureshon oyobi purumu seigyo ni yoru hiheiko kohinshitsu kinosei usumaku seisei gijutsu kaihatsu ni kansuru kenkyu. Japan: N. p., 1997. Web.
Study of the ablation of extra-low temperature aggregate target and the development of technology of formation of non-equilibrium high-quality functional thin films by the plume control; Gokuteion gyoshutai target no abureshon oyobi purumu seigyo ni yoru hiheiko kohinshitsu kinosei usumaku seisei gijutsu kaihatsu ni kansuru kenkyu. Japan.
1997. "Study of the ablation of extra-low temperature aggregate target and the development of technology of formation of non-equilibrium high-quality functional thin films by the plume control; Gokuteion gyoshutai target no abureshon oyobi purumu seigyo ni yoru hiheiko kohinshitsu kinosei usumaku seisei gijutsu kaihatsu ni kansuru kenkyu." Japan.
@misc{etde_587561,
title = {Study of the ablation of extra-low temperature aggregate target and the development of technology of formation of non-equilibrium high-quality functional thin films by the plume control; Gokuteion gyoshutai target no abureshon oyobi purumu seigyo ni yoru hiheiko kohinshitsu kinosei usumaku seisei gijutsu kaihatsu ni kansuru kenkyu}
abstractNote = {A study was made on factors of the formation of high-quality thin films in the pulse laser deposition (PLD) method, a synthesis method of high-grade functional material thin films. In the experiment, plume current measurements using Cu target were conducted for the control of electric and magnetic fields. Especially, the measuring evaluation was made of the two-dimensional distribution including not only the central part of the substrate placed opposite to the target, but the periphery of the substrate. As a result, the following was found out. The distribution of charged particles in the plume is different in positive charge and negative charge, and the negative charge is dispersed/distributed more widely. Accelerating/decelerating effects of charged particles by the electric field are saturated when the bias voltage absolute value is approximately 100V. Ionization is promoted by giving the magnetic field, and the plume distribution is expanded. Positive charged particles of the plume in the magnetic field are decelerated. In the distribution control by giving the electric field, it is effective to think improvement of the distribution not by attracting charged particles by the electric field, but by shutting out charged particles of the same polarity. 29 refs., 75 figs., 2 tabs.}
place = {Japan}
year = {1997}
month = {Mar}
}