A study was made on factors of the formation of high-quality thin films in the pulse laser deposition (PLD) method, a synthesis method of high-grade functional material thin films. In the experiment, plume current measurements using Cu target were conducted for the control of electric and magnetic fields. Especially, the measuring evaluation was made of the two-dimensional distribution including not only the central part of the substrate placed opposite to the target, but the periphery of the substrate. As a result, the following was found out. The distribution of charged particles in the plume is different in positive charge and negative charge, and the negative charge is dispersed/distributed more widely. Accelerating/decelerating effects of charged particles by the electric field are saturated when the bias voltage absolute value is approximately 100V. Ionization is promoted by giving the magnetic field, and the plume distribution is expanded. Positive charged particles of the plume in the magnetic field are decelerated. In the distribution control by giving the electric field, it is effective to think improvement of the distribution not by attracting charged particles by the electric field, but by shutting out charged particles of the same polarity. 29 refs., 75 figs., 2 tabs.