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ETDEWEB   /       /    Film synthesis of transition metal nitrides by ionbeam-assisted vapour deposition. Schichtsynthese von Uebergangsmetallnitriden mit ionenstrahlunterstuetztem Aufdampfen

Film synthesis of transition metal nitrides by ionbeam-assisted vapour deposition. Schichtsynthese von Uebergangsmetallnitriden mit ionenstrahlunterstuetztem Aufdampfen

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Abstract

Nitrides of titanium, chromium, molybdenum and tantalum were prepared by evaporation of the metal in an atmosphere of reduced nitrogen pressure under simultaneous irradiation with highly energetic nitrogen ions. - Chemical analysis showed that the elemental composition of the nitrides is strongly correlated with ion irradiation intensity and with chemical reactivity of the metal. Under identical process conditions titanium formed TiN, but chromium Cr{sub 2}N. In case of molybdenum and tantalum X-ray diffractometry revealed that by deposition under ion irradiation with high energy and beam intensity metastable nitrides with cubic structure could be formed. (orig.).
Authors:
Ensinger, W [1] 
  1. Univ. Heidelberg, Inst. fuer Physikalische Chemie (Germany)
Publication Date:
Nov 01, 1991
Product Type:
Conference
Report Number:
CONF-9105330-
Reference Number:
DE-92-003774; EDB-92-059531
Resource Relation:
Journal Name: Berichte der Bunsengesellschaft fuer Physikalische Chemie; (Germany); Journal Volume: 95:11; Conference: 90. general meeting of Deutsche Bunsen-Gesellschaft fuer Physikalische Chemie e.V. (Bunsen meeting): Physicochemical aspects of thin films, 90. Hauptversammlung der Deutschen Bunsen-Gesellschaft fuer Physikalische Chemie e.V. (Bunsentagung): Physikalisch-Chemische Aspekte Duenner Schichten, Bochum (Germany), 9-11 May 1991
Subject:
36 MATERIALS SCIENCE; CHROMIUM NITRIDES; CHEMICAL VAPOR DEPOSITION; THIN FILMS; MOLYBDENUM NITRIDES; TANTALUM NITRIDES; TITANIUM NITRIDES; CHEMICAL PREPARATION; CONCENTRATION RATIO; ION BEAMS; IRRADIATION; METASTABLE STATES; MICROHARDNESS; PHASE STUDIES; QUANTITY RATIO; SPUTTERING; STOICHIOMETRY; TRANSITION ELEMENT COMPOUNDS; X-RAY DIFFRACTION; X-RAY SPECTRA; BEAMS; CHEMICAL COATING; CHROMIUM COMPOUNDS; COHERENT SCATTERING; DEPOSITION; DIFFRACTION; ENERGY LEVELS; EXCITED STATES; FILMS; HARDNESS; MECHANICAL PROPERTIES; MOLYBDENUM COMPOUNDS; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; REFRACTORY METAL COMPOUNDS; SCATTERING; SPECTRA; SURFACE COATING; SYNTHESIS; TANTALUM COMPOUNDS; TITANIUM COMPOUNDS; 360601* - Other Materials- Preparation & Manufacture
OSTI ID:
5761098
Country of Origin:
Germany
Language:
German
Other Identifying Numbers:
Journal ID: ISSN 0005-9021; CODEN: BBPCA
Submitting Site:
DE
Size:
Pages: 1495-1501
Announcement Date:
May 13, 2001

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Citation Formats

Ensinger, W. Film synthesis of transition metal nitrides by ionbeam-assisted vapour deposition. Schichtsynthese von Uebergangsmetallnitriden mit ionenstrahlunterstuetztem Aufdampfen. Germany: N. p., 1991. Web.
Ensinger, W. Film synthesis of transition metal nitrides by ionbeam-assisted vapour deposition. Schichtsynthese von Uebergangsmetallnitriden mit ionenstrahlunterstuetztem Aufdampfen. Germany.
Ensinger, W. 1991. "Film synthesis of transition metal nitrides by ionbeam-assisted vapour deposition. Schichtsynthese von Uebergangsmetallnitriden mit ionenstrahlunterstuetztem Aufdampfen." Germany.
@misc{etde_5761098,
title = {Film synthesis of transition metal nitrides by ionbeam-assisted vapour deposition. Schichtsynthese von Uebergangsmetallnitriden mit ionenstrahlunterstuetztem Aufdampfen}
 author = {Ensinger, W}
 abstractNote = {Nitrides of titanium, chromium, molybdenum and tantalum were prepared by evaporation of the metal in an atmosphere of reduced nitrogen pressure under simultaneous irradiation with highly energetic nitrogen ions. - Chemical analysis showed that the elemental composition of the nitrides is strongly correlated with ion irradiation intensity and with chemical reactivity of the metal. Under identical process conditions titanium formed TiN, but chromium Cr{sub 2}N. In case of molybdenum and tantalum X-ray diffractometry revealed that by deposition under ion irradiation with high energy and beam intensity metastable nitrides with cubic structure could be formed. (orig.).}
 journal = []
 volume = {95:11}
 place = {Germany}
 year = {1991}
 month = {Nov}
 }