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Sol-gel derived antireflective coatings for silicon

Abstract

The preparation of TiO2-SiO2 AR coatings, containing from 30 to 95 mol % TiO2, from alkoxide precursor solutions (titanium tetraethoxide and silicon tetraethoxide) by a sol-gel process is presented. The preparation of the solutions is described, which involves the separate partial hydrolysis of one or both alkoxides prior to their mixing (Yoldas, 1980). The solutions are applied to polished, circular (1 and 2 in. diameter) silicon wafers by a spinning process. The coated wafers are successively heated in air at each of the following temperatures: 200, 300, 350, 400, and 450 C, and optical measurements are performed on them after each heat treatment. The durability of 90 and 95% TiO2 coatings is evaluated in both acidic and basic environments, and reflectivity, film thickness, and refractive index are measured as a function of exposure time. It is shown that sol-gel films applied at 400 C reveal broad regions of antireflectance compared to other titanium-based films.
Publication Date:
Aug 01, 1981
Product Type:
Journal Article
Reference Number:
ERA-07-037928; EDB-82-093871
Resource Relation:
Journal Name: Sol. Energy Mater.; (Netherlands); Journal Volume: 5
Subject:
14 SOLAR ENERGY; SILICON; ANTIREFLECTION COATINGS; SILICON OXIDES; SURFACE COATING; SOLAR CELLS; SOL-GEL PROCESS; TITANIUM OXIDES; EXPERIMENTAL DATA; FABRICATION; FILMS; HEAT TREATMENTS; REFRACTIVITY; SPECTRAL REFLECTANCE; THICKNESS; CHALCOGENIDES; COATINGS; DATA; DEPOSITION; DIMENSIONS; DIRECT ENERGY CONVERTERS; ELEMENTS; EQUIPMENT; INFORMATION; NUMERICAL DATA; OPTICAL PROPERTIES; OXIDES; OXYGEN COMPOUNDS; PHOTOELECTRIC CELLS; PHOTOVOLTAIC CELLS; PHYSICAL PROPERTIES; SEMIMETALS; SILICON COMPOUNDS; SOLAR EQUIPMENT; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; 140501* - Solar Energy Conversion- Photovoltaic Conversion
OSTI ID:
5642844
Research Organizations:
Sandia Labs., Albuquerque, NM
Country of Origin:
Netherlands
Language:
English
Contract Number:
AC04-76DP00789
Other Identifying Numbers:
Journal ID: CODEN: SOEMD
Submitting Site:
SNL
Size:
Pages: 159-172
Announcement Date:

Citation Formats

Brinker, C J, and Harrington, M S. Sol-gel derived antireflective coatings for silicon. Netherlands: N. p., 1981. Web. doi:10.1016/0165-1633(81)90027-7.
Brinker, C J, & Harrington, M S. Sol-gel derived antireflective coatings for silicon. Netherlands. doi:10.1016/0165-1633(81)90027-7.
Brinker, C J, and Harrington, M S. 1981. "Sol-gel derived antireflective coatings for silicon." Netherlands. doi:10.1016/0165-1633(81)90027-7. https://www.osti.gov/servlets/purl/10.1016/0165-1633(81)90027-7.
@misc{etde_5642844,
title = {Sol-gel derived antireflective coatings for silicon}
author = {Brinker, C J, and Harrington, M S}
abstractNote = {The preparation of TiO2-SiO2 AR coatings, containing from 30 to 95 mol % TiO2, from alkoxide precursor solutions (titanium tetraethoxide and silicon tetraethoxide) by a sol-gel process is presented. The preparation of the solutions is described, which involves the separate partial hydrolysis of one or both alkoxides prior to their mixing (Yoldas, 1980). The solutions are applied to polished, circular (1 and 2 in. diameter) silicon wafers by a spinning process. The coated wafers are successively heated in air at each of the following temperatures: 200, 300, 350, 400, and 450 C, and optical measurements are performed on them after each heat treatment. The durability of 90 and 95% TiO2 coatings is evaluated in both acidic and basic environments, and reflectivity, film thickness, and refractive index are measured as a function of exposure time. It is shown that sol-gel films applied at 400 C reveal broad regions of antireflectance compared to other titanium-based films.}
doi = {10.1016/0165-1633(81)90027-7}
journal = {Sol. Energy Mater.; (Netherlands)}
volume = {5}
journal type = {AC}
place = {Netherlands}
year = {1981}
month = {Aug}
}