Some results of the scaling confirmation factor analysis (SCFA) application in semiconductor gamma-ray spectrometry presented in this contribution points out to a new ground for evaluation the gamma-ray spectra. This whole-spectrum processing approach considerably increases detection sensitivity, especially, if significant interferences being present in the measured spectrum. Precision of the SCFA method is determined by choice of a sufficient number of suitable calibration gamma-ray sources in the energy region of interest, by setting up an acceptable latent hypothesis and by chosen experimental quantification of spectra. The SCFA method is very advantageous to use, for instance, in ultra low-level gamma-spectrometry where counting rates in full energy peaks are extremely low as compared with background interferences. It enables to increase of the sensitivity by the 5-10 times in comparison with the traditional full energy peak net area method (J.K.). 1 fig., 2 tabs., 6 refs.