Abstract
In the last decade researches dealing with the creation of technology for X-ray lithography and for appropriate production equipment have been performed in many countries. The basic aim of these works is to provide a mass production of inexpensive devices with submicron structures (0.7-0.1 {mu}m). Bringing X-ray lithographic technology into commercial practice necessitates to design and build a dedicated SR source for the electronic industry. The use of superconducting bending magnets with 40-70 kG field strength enables the storage ring circumference to be reduced by a factor of 2-5 and the injection energy by a factor of 3-4 as compared to the conventional designs of storage rings. In the present paper we consider a storage ring which was designed for a maximum energy of 600 MeV, with 60 kG field strength in its bending magnets and 10 m circumference. The critical SR wavelength is 8.6 A. The electrons are injected into the storage ring at 50-60 MeV and the maximum stored current is assumed to be equal to 0.3 A. (orig.).
Anashin, V V;
Arbuzov, V S;
Blinov, G A;
Veshcherevich, V G;
Vobly, P D;
Gorniker, E I;
Zinevich, N I;
Zinin, E I;
Zubkov, N I;
Kiselev, V A;
Kollerov, E P;
Kulipanov, G N;
Matveev, Yu G;
Medvedko, A S;
Mezentsev, N A;
Morgunov, L G;
Petrov, V M;
Petrov, S P;
Repkov, V V;
Roenko, V A;
Skrinsky, A N;
Sukhanov, S V;
Tokarev, Yu I;
Trakhtenberg, E M
[1]
- AN SSSR, Novosibirsk. Inst. Yadernoj Fiziki
Citation Formats
Anashin, V V, Arbuzov, V S, Blinov, G A, Veshcherevich, V G, Vobly, P D, Gorniker, E I, Zinevich, N I, Zinin, E I, Zubkov, N I, Kiselev, V A, Kollerov, E P, Kulipanov, G N, Matveev, Yu G, Medvedko, A S, Mezentsev, N A, Morgunov, L G, Petrov, V M, Petrov, S P, Repkov, V V, Roenko, V A, Skrinsky, A N, Sukhanov, S V, Tokarev, Yu I, and Trakhtenberg, E M.
Project of the compact superconducting storage ring Siberia-SM.
Netherlands: N. p.,
1989.
Web.
Anashin, V V, Arbuzov, V S, Blinov, G A, Veshcherevich, V G, Vobly, P D, Gorniker, E I, Zinevich, N I, Zinin, E I, Zubkov, N I, Kiselev, V A, Kollerov, E P, Kulipanov, G N, Matveev, Yu G, Medvedko, A S, Mezentsev, N A, Morgunov, L G, Petrov, V M, Petrov, S P, Repkov, V V, Roenko, V A, Skrinsky, A N, Sukhanov, S V, Tokarev, Yu I, & Trakhtenberg, E M.
Project of the compact superconducting storage ring Siberia-SM.
Netherlands.
Anashin, V V, Arbuzov, V S, Blinov, G A, Veshcherevich, V G, Vobly, P D, Gorniker, E I, Zinevich, N I, Zinin, E I, Zubkov, N I, Kiselev, V A, Kollerov, E P, Kulipanov, G N, Matveev, Yu G, Medvedko, A S, Mezentsev, N A, Morgunov, L G, Petrov, V M, Petrov, S P, Repkov, V V, Roenko, V A, Skrinsky, A N, Sukhanov, S V, Tokarev, Yu I, and Trakhtenberg, E M.
1989.
"Project of the compact superconducting storage ring Siberia-SM."
Netherlands.
@misc{etde_5445660,
title = {Project of the compact superconducting storage ring Siberia-SM}
author = {Anashin, V V, Arbuzov, V S, Blinov, G A, Veshcherevich, V G, Vobly, P D, Gorniker, E I, Zinevich, N I, Zinin, E I, Zubkov, N I, Kiselev, V A, Kollerov, E P, Kulipanov, G N, Matveev, Yu G, Medvedko, A S, Mezentsev, N A, Morgunov, L G, Petrov, V M, Petrov, S P, Repkov, V V, Roenko, V A, Skrinsky, A N, Sukhanov, S V, Tokarev, Yu I, and Trakhtenberg, E M}
abstractNote = {In the last decade researches dealing with the creation of technology for X-ray lithography and for appropriate production equipment have been performed in many countries. The basic aim of these works is to provide a mass production of inexpensive devices with submicron structures (0.7-0.1 {mu}m). Bringing X-ray lithographic technology into commercial practice necessitates to design and build a dedicated SR source for the electronic industry. The use of superconducting bending magnets with 40-70 kG field strength enables the storage ring circumference to be reduced by a factor of 2-5 and the injection energy by a factor of 3-4 as compared to the conventional designs of storage rings. In the present paper we consider a storage ring which was designed for a maximum energy of 600 MeV, with 60 kG field strength in its bending magnets and 10 m circumference. The critical SR wavelength is 8.6 A. The electrons are injected into the storage ring at 50-60 MeV and the maximum stored current is assumed to be equal to 0.3 A. (orig.).}
journal = []
volume = {282:2/3}
place = {Netherlands}
year = {1989}
month = {Oct}
}
title = {Project of the compact superconducting storage ring Siberia-SM}
author = {Anashin, V V, Arbuzov, V S, Blinov, G A, Veshcherevich, V G, Vobly, P D, Gorniker, E I, Zinevich, N I, Zinin, E I, Zubkov, N I, Kiselev, V A, Kollerov, E P, Kulipanov, G N, Matveev, Yu G, Medvedko, A S, Mezentsev, N A, Morgunov, L G, Petrov, V M, Petrov, S P, Repkov, V V, Roenko, V A, Skrinsky, A N, Sukhanov, S V, Tokarev, Yu I, and Trakhtenberg, E M}
abstractNote = {In the last decade researches dealing with the creation of technology for X-ray lithography and for appropriate production equipment have been performed in many countries. The basic aim of these works is to provide a mass production of inexpensive devices with submicron structures (0.7-0.1 {mu}m). Bringing X-ray lithographic technology into commercial practice necessitates to design and build a dedicated SR source for the electronic industry. The use of superconducting bending magnets with 40-70 kG field strength enables the storage ring circumference to be reduced by a factor of 2-5 and the injection energy by a factor of 3-4 as compared to the conventional designs of storage rings. In the present paper we consider a storage ring which was designed for a maximum energy of 600 MeV, with 60 kG field strength in its bending magnets and 10 m circumference. The critical SR wavelength is 8.6 A. The electrons are injected into the storage ring at 50-60 MeV and the maximum stored current is assumed to be equal to 0.3 A. (orig.).}
journal = []
volume = {282:2/3}
place = {Netherlands}
year = {1989}
month = {Oct}
}