A program has been developed to conduct inversion analysis of two-dimensional model using MT data, accurately. For the developed program, finite element method (FEM) was applied to the section of sequential analysis. A method in which Jacobian matrix is calculated only one first time and is inversely analyzed by fixing this during the repetition, and a method in which Jacobian matrix is corrected at each repetition of inversion analysis, were compared mutually. As a result of the numerical simulation, it was revealed that the Jacobian correction method provided more stable convergence for the simple 2D model, and that the calculation time is almost same as that of the Jacobian fixation method. To confirm the applicability of this program to actually measured data, results obtained from this program were compared with those from the Schlumberger method analysis by using MT data obtained in the Hatchobara geothermal area. Consequently, it was demonstrated that the both are well coincided mutually. 17 refs., 7 figs.