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Development of micro capacitive accelerometer for subsurface microseismic measurement; Micromachining ni yoru chika danseiha kenshutsu no tame no silicon yoryogata kasokudo sensor no seisaku

Abstract

A silicon capacitive accelerometer was fabricated to detect subsurface elastic waves by using micromachining technology. Characteristics required for it call for capability of detecting acceleration with amplitudes from 0.1 to 1 gal and flat amplitude characteristics in frequency bands of 10 Hz to several kHz. For the purpose of measuring transition phenomena, linear phase characteristics in the required bands must be guaranteed, cross sensitivity must be small, and resistance to water, pressure and heat is demanded. Sensitivity of the sensor is determined finally by noise level in a detection circuit. The sensor`s minimum detection capability was 40 mgal in the case of the distance between a weight and an electrode being 3 {mu}m. This specification value is a value realizable by the current micromachining technology. Dimensions for the weight and other members were decided with the natural frequency to make band width 2 kHz set to 4 kHz. Completion of the product has not been achieved yet, however, because of a problem that the weight gets stuck on the electrode plate in anode bonding in the assembly process. 7 refs., 5 figs., 1 tab.
Authors:
Nishizawa, M; Niitsuma, H; Esashi, M [1] 
  1. Tohoku University, Sendai (Japan). Faculty of Engineering
Publication Date:
May 27, 1997
Product Type:
Conference
Report Number:
CONF-9705167-
Reference Number:
SCA: 440700; 580000; PA: NEDO-97:912208; EDB-97:120318; SN: 97001846500
Resource Relation:
Conference: 96. SEGJ conference, Butsuri tansa gakkai dai 96 kai (1997 nendo shunki) gakujutsu koenkai, Tokyo (Japan), 27-29 May 1997; Other Information: PBD: 27 May 1997; Related Information: Is Part Of Proceeding of the 96th (spring, fiscal 1997) SEGJ Conference; PB: 502 p.; Butsuri tansa gakkai dai 96 kai (1997 nendo shunki) gakujutsu koenkai koen ronbunshu
Subject:
44 INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS; 58 GEOSCIENCES; SEISMIC WAVES; UNDERGROUND; SEISMIC DETECTORS; MACHINING; MINIATURIZATION; ACCELEROMETERS; SI SEMICONDUCTOR DETECTORS; CAPACITORS; FREQUENCY RANGE; AMPLITUDES; TRANSIENTS; SENSITIVITY; SIGNAL-TO-NOISE RATIO; EIGENFREQUENCY
OSTI ID:
522610
Research Organizations:
Society of Exploration Geophysicists of Japan, Tokyo (Japan)
Country of Origin:
Japan
Language:
Japanese
Other Identifying Numbers:
Other: ON: DE97770262; TRN: 97:912208
Availability:
Available from The Society of Exploration Geophysicists of Japan, 2-18, Nakamagome 2-chome, Ota-ku, Tokyo, Japan; OSTI as DE97770262
Submitting Site:
NEDO
Size:
pp. 35-38
Announcement Date:

Citation Formats

Nishizawa, M, Niitsuma, H, and Esashi, M. Development of micro capacitive accelerometer for subsurface microseismic measurement; Micromachining ni yoru chika danseiha kenshutsu no tame no silicon yoryogata kasokudo sensor no seisaku. Japan: N. p., 1997. Web.
Nishizawa, M, Niitsuma, H, & Esashi, M. Development of micro capacitive accelerometer for subsurface microseismic measurement; Micromachining ni yoru chika danseiha kenshutsu no tame no silicon yoryogata kasokudo sensor no seisaku. Japan.
Nishizawa, M, Niitsuma, H, and Esashi, M. 1997. "Development of micro capacitive accelerometer for subsurface microseismic measurement; Micromachining ni yoru chika danseiha kenshutsu no tame no silicon yoryogata kasokudo sensor no seisaku." Japan.
@misc{etde_522610,
title = {Development of micro capacitive accelerometer for subsurface microseismic measurement; Micromachining ni yoru chika danseiha kenshutsu no tame no silicon yoryogata kasokudo sensor no seisaku}
author = {Nishizawa, M, Niitsuma, H, and Esashi, M}
abstractNote = {A silicon capacitive accelerometer was fabricated to detect subsurface elastic waves by using micromachining technology. Characteristics required for it call for capability of detecting acceleration with amplitudes from 0.1 to 1 gal and flat amplitude characteristics in frequency bands of 10 Hz to several kHz. For the purpose of measuring transition phenomena, linear phase characteristics in the required bands must be guaranteed, cross sensitivity must be small, and resistance to water, pressure and heat is demanded. Sensitivity of the sensor is determined finally by noise level in a detection circuit. The sensor`s minimum detection capability was 40 mgal in the case of the distance between a weight and an electrode being 3 {mu}m. This specification value is a value realizable by the current micromachining technology. Dimensions for the weight and other members were decided with the natural frequency to make band width 2 kHz set to 4 kHz. Completion of the product has not been achieved yet, however, because of a problem that the weight gets stuck on the electrode plate in anode bonding in the assembly process. 7 refs., 5 figs., 1 tab.}
place = {Japan}
year = {1997}
month = {May}
}